Single-Chip Integrated 3-D Hall Sensor

Abstract

A single-chip three-dimensional(3-D)Hall sensor for high-accuracy three-axismagnetic-field measurements is presented. The chip contains a 3-D Hall device, the analog signal conditioning circuit, an A/D converter and the digital signal-processing unit. The 3-D Hall device contains horizontal and vertical Hall elements. The horizontal Hall element measures the perpendicular component, and four vertical Hallelements measure the two in-plane components of a magnetic flux. With the detailed analysis of the essential factors affecting Hall voltage, the signal conditioning circuit based on spinning current technique is provided, which works in 100kHz and can cancel the offset, reduce the 1/f noise and amplify the signal. The digital signal-processing unit provides the high-accuracy mapping algorithm between measured values and target values.

Modeling of Three-Axis Hall Effect Sensors Based on Integrated Magnetic Concentrator

“…This solution has been improved in the context of accuracy by using three pairs of two Hall plates [12]. Other approaches include combining a horizontal Hall plate and two pairs of vertical Hall sensors to measure z-axis and x,y-axis respectively [13][14]. These typical solutions have the advantage that each axis is measured independently.…”

A New Design of a CMOS Vertical Hall Sensor with a Low Offset

“…Magnetic sensors have been widely used for applications in current sensing [ 1 , 2 , 3 ], biosensors [ 4 ], and consumer devices [ 5 , 6 ]. Hall effect sensors, which can be integrated into signal conditioning circuits using complementary metal oxide semiconductor (CMOS) technology, have the largest market share among all kinds of magnetic sensors [ 7 ]. Horizontal Hall sensors (HHSs), which are used to detect the magnetic field orthogonal to its surface, can meet the requirements of most application scenarios [ 8 ].…”