1997
DOI: 10.1016/s0040-6090(96)09371-6
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Single crystal silicon on glass

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Cited by 3 publications
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“…We can also see that Corning 1720 series AS glass is more than capable of maintaining vacuum for our target time. Its CTE is well matched with silicon to which is can be anodically bonded, albeit at much higher temperatures than Pyrex due to the low alkali content [138][139][140] .…”
Section: B Permeationmentioning
confidence: 99%
“…We can also see that Corning 1720 series AS glass is more than capable of maintaining vacuum for our target time. Its CTE is well matched with silicon to which is can be anodically bonded, albeit at much higher temperatures than Pyrex due to the low alkali content [138][139][140] .…”
Section: B Permeationmentioning
confidence: 99%