2022
DOI: 10.1016/j.ijleo.2022.170068
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Single-mode SU-8 waveguide fabricated using ultrafast direct laser writing

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Cited by 8 publications
(9 citation statements)
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“…Reproduced with permission. [ 101 ] Copyright 2022, Elsevier. l) SEM image of the air‐suspended waveguides.…”
Section: Waveguide Materials For Fsdlwmentioning
confidence: 99%
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“…Reproduced with permission. [ 101 ] Copyright 2022, Elsevier. l) SEM image of the air‐suspended waveguides.…”
Section: Waveguide Materials For Fsdlwmentioning
confidence: 99%
“…Up to now, different materials have been utilized to microfabricate optical waveguides via FsDLW, such as dielectric crystals, [56,57,67] glasses, [85,97] polymers, [63,96,98] and two-photon photoresists. [99][100][101][102] Different materials will exhibit their own performance advantages. This section mainly introduces some common materials that can be fabricated by FsDLW and their applicable scenes.…”
Section: Waveguide Materials For Fsdlwmentioning
confidence: 99%
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