Single-mode TE00–TM00 optical waveguides on SU-8 polymer

Bêche, Bruno; Pelletier, Nicolas; Gaviot, Étienne; Zyss, Joseph

doi:10.1016/j.optcom.2003.11.016

Cited by 107 publications

(65 citation statements)

References 6 publications

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“…As a substrate soda-lime glass plates were used, previously washed and rinsed in nitric acid, acetic acid and ammonia liquor. The polymer SU8 is characterized by a weak adhesion to glass substrates [15]; therefore, in order to avoid damages of the structure in the course of depositing the polymer, the entire procedure of washing was accomplished in a laminar cell with air filtration, holding it for 5 minutes at a temperature of 130…”

Section: Fabricationmentioning

confidence: 99%

“…The final stage of generation was the development of the structure by means of the developer PGME [15]. The time of the development can also be gathered from Table 1.…”

Section: Fabricationmentioning

confidence: 99%

“…Because of its very good optical properties [13,14] it is utilized in the production of optical sensors operating in the interferometer system [15].…”

Section: Introductionmentioning

confidence: 99%

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Differential interference in a polymer waveguide

Gut¹

2011

Bulletin of the Polish Academy of Sciences: Technical Sciences

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Abstract. The paper presents the results of investigations concerning the measurement of the refractive index and the thickness of planar waveguide structures, obtained by photo polymerization of the polymer SU8. In the paper the mode sensitivity has been calculated as a function of the thickness in a single-mode structure. The thickness of the layer has been determined in the case when the interferometer is most sensitive to changes of the refractive index.

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Section: Fabricationmentioning

confidence: 99%

“…The final stage of generation was the development of the structure by means of the developer PGME [15]. The time of the development can also be gathered from Table 1.…”

Section: Fabricationmentioning

confidence: 99%

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Differential interference in a polymer waveguide

Gut¹

2011

Bulletin of the Polish Academy of Sciences: Technical Sciences

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“…Because of its very good optical properties it is utilized in the production of optical sensors operating in the interferometer system [7,8]. …”

Section: Introductionmentioning

confidence: 99%

Measurements of the Attenuation by Means οf the Scattered Light of Planar Waveguide Structure, Basing on the Polymer SU8 on a Substrate οf Sodium-Calcium Glass

Gut

Nabaglo

2009

Acta Phys. Pol. A

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The paper presents the results of investigations concerning the measurement of the attenuation of planar waveguide structures obtained by means of the photopolymerization of the polymer SU8. The applied substrate was sodium-calcium glass. Attenuation is one of the fundamental parameters of optical waveguide, the knowledge of which is of crucial importance in the construction of various kinds of optical sensors. A method of its measurement has been presented, consisting in the recording of the intensity of scattered light making use of CCD camera. The paper deals also with the generation of planar polymer waveguide, taking into account problems connected with the adhesion to glass substrates.

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“…The cantilever and waveguide core are structured in SU-8 2005 ͑MicroChem, USA͒, which has been reported in the literature to have a low propagation loss combined with providing high cantilever sensitivity. [9][10][11] For cladding material the modified SU-8, mr-L 6050 XP ͑MicroResist, Germany͒ is used. This material combination has been shown to be highly suitable for the fabrication of micro-optoelectromechanical-system devices.…”

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confidence: 99%

Integrated optical readout for miniaturization of cantilever-based sensor system

Nordström

Zauner

Calleja³

et al. 2007

Applied Physics Letters

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The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations.

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Single-mode TE00–TM00 optical waveguides on SU-8 polymer

Cited by 107 publications

References 6 publications

Differential interference in a polymer waveguide

Differential interference in a polymer waveguide

Measurements of the Attenuation by Means οf the Scattered Light of Planar Waveguide Structure, Basing on the Polymer SU8 on a Substrate οf Sodium-Calcium Glass

Integrated optical readout for miniaturization of cantilever-based sensor system

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