Single-Mode-VCSEL With a Ring-Shaped Self-Aligned Recessed Metal Mode Filter

Cheng, Hao-Tien; Min, Szu-Yu; Yang, Yun-Cheng; Lin, Hung‐Hsuan; Pan, J.S.; Wu, Chao−Hsin

doi:10.1109/led.2023.3288935

Cited by 7 publications

(1 citation statement)

References 33 publications

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“…Efforts in achieving single fundamental mode operating condition mainly focus on selectively confining the optical transverse modes. These include, but are not limited to, reduced optical aperture size below 5 μm, 15,16 impurity-induced disordered crystalline structure in the cladding regions of the optical cavity, 17 surface gratings at the top mirror, 18,19 surface relief, 20 and photonic crystal (PhC) structures. 21 These methods mostly support the stimulation of the fundamental mode by increasing the loss for the higher order modes, which limits their maximum output power to just a few milliwatts.…”

Section: Introductionmentioning

confidence: 99%

Polarization-stable single-mode multi-junction VCSELs with integrated anti-phase mode filter

Ghods,

Dummer,

Johnson

2023

Journal of Applied Physics

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In this paper, polarization-stable and spectrally single-mode operation of oxide-confined multi-junction vertical-cavity surface-emitting lasers (VCSELs) are achieved by using a non-circular integrated anti-phase transverse mode filter. A record-high single-mode output power is obtained by radially reducing effective mirror reflectivity at the surface areas where the higher order modes are expected to lase, leading to an increase in the threshold gain for these transverse modes, all the while minimal losses are introduced to the fundamental mode. The polarization control of such devices is achieved by using a non-circular mode filter in order to perturb the cylindrical symmetry of the cavity. An elliptically etched surface relief is shown to be effective in realizing a single-mode single-polarization device over a wide range of operating bias currents and temperatures. The continuous-wave light–current–voltage characteristics of 8-junction 940 nm VCSELs show single-mode output power >13 mW at room temperature, spectrally measured with a side-mode suppression ratio of >30 dB. This single-mode performance can be achieved depending on the ratio between the relief opening and the oxide aperture size. Additionally, the single-polarization behavior of such devices (with an extinction ratio of >15 dB) is shown to be dependent on the orientation of the elliptical mode filter, where the light is mainly polarized along the minor axis of the elliptical feature. Overall, combined with a multi-junction active region, the elliptical model filter is able to achieve highly efficient single-mode linearly polarized VCSELs.

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Section: Introductionmentioning

confidence: 99%

Polarization-stable single-mode multi-junction VCSELs with integrated anti-phase mode filter

Ghods,

Dummer,

Johnson

2023

Journal of Applied Physics

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Single-Mode VCSELs With Zn-Diffusion Apertures for Applications in Co-Packaged Optics Systems

Lin,

Hsu,

Tung

et al. 2025

IEEE J. Select. Topics Quantum Electron.

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26.5625 Gbaud PAM-4 short-reach transmission at 75°C using 850 nm VCSELs with strategic oxide guiding layer positioning

Yang,

Chen,

Chiu

et al. 2024

Opt. Lett.

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This article presents an all-epitaxy approach to reduce the root mean square spectral width (Δλ R M S ) of 850 nm oxide-confined vertical cavity surface-emitting lasers (VCSELs) with a large aperture of 7 µm through strategic optimization of the oxide guiding layer within the epitaxy structure. At 75°C, the VCSEL demonstrates a Δλ R M S of ∼0.3 nm at a bias current of 7.5 mA. Furthermore, the VCSEL achieves successful transmission of 26.5625 Gbaud PAM-4 modulation over a short-reach (SR) OM4 fiber link while maintaining a TDECQ budget below the 4.5 dB specified by 50G IEEE Ethernet standards.

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Single-Mode-VCSEL With a Ring-Shaped Self-Aligned Recessed Metal Mode Filter

Cited by 7 publications

References 33 publications

Polarization-stable single-mode multi-junction VCSELs with integrated anti-phase mode filter

Polarization-stable single-mode multi-junction VCSELs with integrated anti-phase mode filter

Single-Mode VCSELs With Zn-Diffusion Apertures for Applications in Co-Packaged Optics Systems

26.5625 Gbaud PAM-4 short-reach transmission at 75°C using 850 nm VCSELs with strategic oxide guiding layer positioning

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