Single nano-digit and closed-loop scanning probe lithography for manufacturing of electronic and optical nanodevices

Cost effective patterning based on scanning probe nanolithography (SPL) has the potential for electronic and optical nano-device manufacturing and other nanotechnological applications. One of the fundamental advantages of SPL is its capability for patterning and imaging employing the same probe. This is achieved with self-sensing and self-actuating cantilevers, also known as ‘active’ cantilevers. Here we used active cantilevers to demonstrate a novel path towards single digit nanoscale patterning by employing a low energy (<100 eV) electron exposure to thin films of molecular resist. By tuning the electron energies to the lithographically relevant chemical resist transformations, the interaction volumes can be highly localized. This method allows for greater control over spatially confined lithography and enhances sensitivity. We found that at low electron energies, the exposure in ambient conditions required approximately 10 electrons per single calixarene molecule to induce a crosslinking event. The sensitivity was 80-times greater than a classical electron beam exposure at 30 keV. By operating the electro-exposure process in ambient conditions a novel lithographic reaction scheme based on a direct ablation of resist material (positive tone) is presented.

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“…Beyond that, sub-5 nm alignment accuracy is given. SPL also shows great potential for forming 3D structures at comparable scales [88,89,92].…”

Section: Discussionmentioning

confidence: 99%

Scanning probe lithography on calixarene towards single-digit nanometer fabrication

Kaestner

Rangelow

2020

Int. J. Extrem. Manuf.

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“…Well-established methodologies incorporating precise engineering control have made lithographic patterning techniques capable of developing 3D entities at the nanoscale [ 30 , 31 , 32 , 33 , 34 ]. Using the techniques, a variety of 3D constructs have been developed with different applications in biomedical devices [ 35 , 36 , 37 , 38 ], optoelectronics and electronics [ 39 , 40 , 41 , 42 ], microelectromechanical systems [ 43 , 44 ], and sensors [ 45 , 46 , 47 , 48 ]. However, these methods combine high costs with a relatively slow process, making the duration of production problematic.…”

Section: Introductionmentioning

confidence: 99%

Tuning Surface Morphology of Fluorescent Hydrogels Using a Vortex Fluidic Device

2020

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In recent decades, microfluidic techniques have been extensively used to advance hydrogel design and control the architectural features on the micro- and nanoscale. The major challenges with the microfluidic approach are clogging and limited architectural features: notably, the creation of the sphere, core-shell, and fibers. Implementation of batch production is almost impossible with the relatively lengthy time of production, which is another disadvantage. This minireview aims to introduce a new microfluidic platform, a vortex fluidic device (VFD), for one-step fabrication of hydrogels with different architectural features and properties. The application of a VFD in the fabrication of physically crosslinked hydrogels with different surface morphologies, the creation of fluorescent hydrogels with excellent photostability and fluorescence properties, and tuning of the structure–property relationship in hydrogels are discussed. We conceive, on the basis of this minireview, that future studies will provide new opportunities to develop hydrogel nanocomposites with superior properties for different biomedical and engineering applications.

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“…Scanning probe lithography (SPL), especially FE-SPL, is a powerful tool for nanoscale patterning [27][28][29][30][31]. It provides an accessible, easy-to-operate, and cost-effective alternative compared to other high-resolution patterning techniques.…”

Section: Introductionmentioning

confidence: 99%

“…The scattering range is spatially small, which expressively shrinks the proximity effect. FE-SPL was thus employed for the demonstration of nanoscale devices such as split-ring resonators, photon detectors, quantum devices, and transistors [29,30,32,33].…”

Section: Introductionmentioning

confidence: 99%

Silk as a biodegradable resist for field-emission scanning probe lithography

Bicer¹,

Kumar²,

Melikov³

et al. 2020

Nanotechnology

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The patterning of silk allows for manufacturing various structures with advanced functionalities for optical and tissue engineering and drug delivery applications. Here, we propose a high-resolution nanoscale patterning method based on field-emission scanning probe lithography (FE-SPL) that crosslinks the biomaterial silk on conductive indium tin oxide (ITO) promoting the use of a biodegradable material as resist and water as a developer. During the lithographic process, Fowler-Nordheim electron emission from a sharp tip was used to manipulate the structure of silk fibroin from random coil to beta sheet and the emission formed nanoscale latent patterns with a critical dimension (CD) of ∼50 nm. To demonstrate the versatility of the method, we patterned standard and complex shapes. This method is particularly attractive due to its ease of operation without relying on a vacuum or a special gaseous environment and without any need for complex electronics or optics. Therefore, this study paves a practical and cost-effective way toward patterning biopolymers at ultra-high level resolution.

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Single nano-digit and closed-loop scanning probe lithography for manufacturing of electronic and optical nanodevices

Cited by 5 publications

References 15 publications

Scanning probe lithography on calixarene towards single-digit nanometer fabrication

Scanning probe lithography on calixarene towards single-digit nanometer fabrication

Tuning Surface Morphology of Fluorescent Hydrogels Using a Vortex Fluidic Device

Silk as a biodegradable resist for field-emission scanning probe lithography

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