Single-pixel terahertz imaging: a review

Zanotto, Luca; Piccoli, Riccardo; Morandotti, Roberto; Razzari, Luca

doi:10.29026/oea.2020.200012

Cited by 40 publications

(11 citation statements)

References 70 publications

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“…Moreover, two different sets of patterns, Hadamard and random, were applied, showing the superiority of Hadamard masks to obtain a high spatial resolution. 133…”

Section: Near-field Thz Imaging For Pcb Passive Componentsmentioning

confidence: 99%

Review of THz-based semiconductor assurance

True

Jessurun

et al. 2021

Opt. Eng.

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Terahertz radiation for inspection and fault detection has been of interest for the semiconductor industry since the first generation and detection of THz signals. Until recent hardware advances, THz systems lacked the signal quality and reliability for use as an effective nondestructive testing (NDT) method. Incremental advances in THz sources, detectors, and signal processing resulted in the successful applied-industrial use of THz NDT techniques on carbon fiber laminates, automotive coatings, and for detection of counterfeit pharmaceutical tablets. Semiconductor inspection and verification methods ensure the functionality and thereby safety of vital electronics for several critical industries. For this reason, the reliability and verification of a THz NDT method must exceed currently used inspection systems. With recent laboratory access to THz radiation, THz inspection methods are often compared with existing optical, electrical, and volumetric semiconductor verification techniques for their production monitoring and failure analysis viability. This review will cover THz techniques and their applications at the printed circuit board (PCB), integrated circuit (IC), and transistor/gate scales. The THz radiation gap spans between optical and electronic ranges with a millimeter-sized wavelength allowing for adequate penetration of plastic and ceramic and semiconductor materials. THz radiation can be used to determine structural features, electrical signatures in the THz range, and chemical information simultaneously. Cost and environmental limitations restricted the ability for THz NDT semiconductor inspection methods to escape the lab and succeed in the dynamic environment of a semiconductor fabrication environment. Hybridized metrology methods incorporating information from multiple inspection tools are a regime where THz spectral and structural data can be combined with existing methods such as optical, x-ray, or E-beam. THz can be used initially to offer support to the complex failure analysis and verification requirements of the semiconductor industry from nanoscale to macroscale features and components. For THz systems to become independent inspection tools used for semiconductor production monitoring, in the lab or fab, this will require a confident level of statistical process control for THz signal generation, detection, or processing. Applied industrial semiconductor device inspection will likely be a result of a combination of research into THz hardware, reconstruction techniques, and the widespread application of machine learning techniques. Many breakthroughs occurred over the years to enable successful nondestructive characterization and inspection of semiconductor devices from the nanoscale transistors to fully packaged integrated circuits and assembled PCBs.

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“…Moreover, two different sets of patterns, Hadamard and random, were applied, showing the superiority of Hadamard masks to obtain a high spatial resolution. 133…”

Section: Near-field Thz Imaging For Pcb Passive Componentsmentioning

confidence: 99%

Review of THz-based semiconductor assurance

True

Jessurun

et al. 2021

Opt. Eng.

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“…Although most THz SLMs are still in the laboratory stage, they have shown rich application prospects. For example, THz SLMs are used for single pixel imaging [ 31 ], which avoids raster scanning and expensive THz focal plane array detector. High resolution imaging is possible using the low-cost continuous-wave source and point detector.…”

Section: Introductionmentioning

confidence: 99%

Recent Progress of Terahertz Spatial Light Modulators: Materials, Principles and Applications

2022

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Terahertz (THz) technology offers unparalleled opportunities in a wide variety of applications, ranging from imaging and spectroscopy to communications and quality control, where lack of efficient modulation devices poses a major bottleneck. Spatial modulation allows for dynamically encoding various spatial information into the THz wavefront by electrical or optical control. It plays a key role in single-pixel imaging, beam scanning and wavefront shaping. Although mature techniques from the microwave and optical band are not readily applicable when scaled to the THz band, the rise of metasurfaces and the advance of new materials do inspire new possibilities. In this review, we summarize the recent progress of THz spatial light modulators from the perspective of functional materials and analyze their modulation principles, specifications, applications and possible challenges. We envision new advances of this technique in the near future to promote THz applications in different fields.

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“…The information obtained from imaging at the Terahertz (THz) frequencies (0.1-10 THz) has received much attention in recent decades due to its unique properties [1][2][3][4][5][6]. Terahertz time domain spectroscopy (THZ-TDS) imaging is one of the most powerful techniques in the terahertz imaging field.…”

Section: Introductionmentioning

confidence: 99%

Fast Terahertz Imaging Model Based on Group Sparsity and Nonlocal Self-Similarity

et al. 2022

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In order to solve the problems of long-term image acquisition time and massive data processing in a terahertz time domain spectroscopy imaging system, a novel fast terahertz imaging model, combined with group sparsity and nonlocal self-similarity (GSNS), is proposed in this paper. In GSNS, the structure similarity and sparsity of image patches in both two-dimensional and three-dimensional space are utilized to obtain high-quality terahertz images. It has the advantages of detail clarity and edge preservation. Furthermore, to overcome the high computational costs of matrix inversion in traditional split Bregman iteration, an acceleration scheme based on conjugate gradient method is proposed to solve the terahertz imaging model more efficiently. Experiments results demonstrate that the proposed approach can lead to better terahertz image reconstruction performance at low sampling rates.

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Single-pixel terahertz imaging: a review

Cited by 40 publications

References 70 publications

Review of THz-based semiconductor assurance

Review of THz-based semiconductor assurance

Recent Progress of Terahertz Spatial Light Modulators: Materials, Principles and Applications

Fast Terahertz Imaging Model Based on Group Sparsity and Nonlocal Self-Similarity

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