Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Choi, Dong J.; Nam, Seung-Woo; Kim, Dong U.; Park, Young J.; Her, Man J.; Lim, Min G.; Hong, Myung S.; Song, Hye-Ju; Yu, Jaesok; Han, Sangyoon

doi:10.1364/cleopr.2022.ctha17d_02

Proceedings of the 2022 Conference on Lasers and Electro-Optics Pacific Rim 2022

DOI: 10.1364/cleopr.2022.ctha17d_02

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Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Dong J. Choi

Seung-Woo Nam

Dong U. Kim

et al.

Abstract: We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively.

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Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Abstract: We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively.

Cited by 0 publications

References 4 publications

No citations

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