2014
DOI: 10.1364/ao.53.000487
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Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles

Abstract: To improve the measurement accuracy of the profilometer for large optical surfaces, a new single-step spatial rotation error separation technique (SSEST) is proposed to separate the surface profile error and spindle spatial rotation error, and a novel SSEST-based system for surface profile measurement is developed. In the process of separation, two sets of measured results at the ith measurement circle are obtained before and after the rotation of error separation table, the surface profile error and spatial r… Show more

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Cited by 7 publications
(3 citation statements)
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“…Since φ x , φ y , φ z , δ x and δ y are constant values, if the measured part is rotated around the rotation axis, the error will appear repeatedly, that is, the error exhibits a periodic signal with a period of 2π . Therefore, this paper investigates the method of error separation from the periodicity of error [15,16].…”
Section: Research On Error Separation Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Since φ x , φ y , φ z , δ x and δ y are constant values, if the measured part is rotated around the rotation axis, the error will appear repeatedly, that is, the error exhibits a periodic signal with a period of 2π . Therefore, this paper investigates the method of error separation from the periodicity of error [15,16].…”
Section: Research On Error Separation Methodsmentioning
confidence: 99%
“…Formula (15) represents a known quantity obtained through multiple measurements, but it is not the final measurement result required, so a secondary separation operation is necessary. To achieve this, the discrete Fourier transform (DFT) is applied to both sides of formula (15). By utilizing the delay-phase shift property of DFT, the equation can be solved as shown in formula ( 16):…”
Section: Error Separation Of Axial Center Of Gravity Measurementmentioning
confidence: 99%
“…Generally, there are many sources of error in measurement methods. Researchers found: it is difficult to separate the error resulting from the stylus vibration and the measured surface in roundness measurement [3][4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%