Sintered reaction-bonded silicon nitride ceramics for power-device substrates -review-

Nakashima, Yuki; Miyazaki, Hiroyuki; Zhou, You; Hirao, Kiyoshi; Ohji, Tatsuki; Fukushima, Manabu

doi:10.1016/j.oceram.2023.100506

Cited by 3 publications

(2 citation statements)

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“…Commercially available 25 mm square Si 3 N 4 substrates (TSN-90, Toshiba Materials Co., Ltd., Kanagawa, Japan) were ground to three different thicknesses of 250, 150, and 70 ¯m. The substrate has dense structure (3.35 g/cm 3 ) and some large-elongated grains having widths around 5 ¯m and lengths over 20 ¯m dispersed in a matrix of fine grains. 7) After surface polishing, in which the representative surface roughness (R a ) was 0.369 ¯m, the DBS was measured using an AC voltage tester (7473, Keisoku Giken Co., Ltd., Kanagawa, Japan).…”

Section: Methodsmentioning

confidence: 99%

“…Among ceramic materials, Si 3 N 4 is one of the most promising heat-dissipating substrate materials owing to its outstanding mechanical properties and improved thermal conductivity. 2), 3) In addition to these properties, dielectric breakdown strength (DBS), which indicates stability under high voltage, is also essential. However, there are a limited number of reports on DBS of sintered Si 3 N 4 .…”

Section: Introductionmentioning

confidence: 99%

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Dielectric breakdown strength measurement of silicon nitride ceramics by McKewon electrode

Nakashima,

Hirao,

Zhou

et al. 2024

J. Ceram. Soc. Japan

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Dielectric breakdown strength (DBS) of silicon nitride substrates with thicknesses of 0.25, 0.15, and 0.07 mm was measured by four types of electrodes: 10 mm spherical, 6 mm circular column shape, and 10-and 15-mm goldcoated film. In addition, the DBS was determined by a McKewon electrode in which the gap between the above spherical electrode and substrate was filled with epoxy resin. The DBS increased with decreases in the electrode diameter and the substrate thickness owing to the decreased number of defects within the measurement volume. The DBS measured by the McKewon electrode was the highest because the epoxy resin prevents electrical discharge under high voltages. However, the thickness-independent, intrinsic DBS, which was estimated from the results obtained by the McKewon electrode, was still significantly low compared to the theoretical DBS, indicating that various internal defects such as pores and boundary phases lower the DBS.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%