Size-controllable quartz nanostructure for signal enhancement of DNA chip

Kim, Jung Suk; Cho, Jae Bum; Park, Bo Gi; Lee, Wonbae; Lee, Kyu Back; Oh, Min Kyu

doi:10.1016/j.bios.2010.09.010

Cited by 13 publications

(9 citation statements)

References 22 publications

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“…Next the resin coated glass was dry-etched by RIE in order to fabricate SL having a parabolic shape. [6,7,8]. After the SL fabrication, microcavity OLEDs were fabricated.…”

Section: Resultsmentioning

confidence: 99%

P‐194: Control of the Viewing Angle Dependence by Inserting of Scattering Layer on Microcavity OLEDs

Park

Shim

Bae

et al. 2017

Symp Digest of Tech Papers

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“…Next the resin coated glass was dry-etched by RIE in order to fabricate SL having a parabolic shape. [6,7,8]. After the SL fabrication, microcavity OLEDs were fabricated.…”

Section: Resultsmentioning

confidence: 99%

P‐194: Control of the Viewing Angle Dependence by Inserting of Scattering Layer on Microcavity OLEDs

Park

Shim

Bae

et al. 2017

Symp Digest of Tech Papers

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“…The nRS was fabricated by a simple method consisting of RIE by oxygen (O 2 ) and argon (Ar) [7,8] and trifluoromethane (CHF 3 ) gases. Figure 1 shows the entire fabrication process of nRS.…”

Section: Methodsmentioning

confidence: 99%

“…After cleaning, resin was spincoated on the glass substrate and then annealed on a hot plate ( Figure 1b). Next the resin coated glass was dry-etched by RIE in order to fabricate nRS having a parabolic shape [7,8] (Figure 1c and d). The surface morphology of nRS could be modified according to the spin-coating rpm of the resin.…”

Section: Methodsmentioning

confidence: 99%

P‐161L: Late‐News Poster: High‐Efficiency Inverted Top‐Emitting Organic Light‐Emitting Diodes with Random Corrugated Structure

Park

Lee

Choi

et al. 2014

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In this study, we show that high-efficiency Inverted Top-Emitting Organic Light-Emitting Diodes (ITEOLEDs) by using nanosized random structure (nRS). The nRS is fabricated by Reactive ion etching (RIE) process. This process enables simple and inexpensive manufacturing. Compared to a conventional device, ITEOLEDs with nRS showed improved power efficiency (+19.87%), Current efficiency (+32.65%) and external quantum efficiency (+29.24%) at a luminance 500cd/m 2 .

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“…Hein et al reported an innovatively simple and fast method of nanostructure fabrication on glass surfaces by performing RIE after deposition of an approximately 10-nm-thin lithographically unstructured metallic layer onto the surface [11]. We also reported a simple and fast mask-free approach to fabricate nanostructures, which uses two-step RIE (O 2 and CF 4 RIE) of polymer-coated quartz in our previous studies [3,4]. …”

Section: Introductionmentioning

confidence: 94%

A simple and fast fabrication of a both self-cleanable and deep-UV antireflective quartz nanostructured surface

et al. 2012

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Both self-cleanability and antireflectivity were achieved on quartz surfaces by forming heptadecafluoro-1,1,2,2-tetrahydrodecyltrichlorosilane self-assembled monolayer after fabrication of nanostructures with a mask-free method. By exposing polymethylmethacrylate spin-coated quartz plates to O2 reactive ion etching (RIE) and CF4 RIE successively, three well-defined types of nanopillar arrays were generated: A2, A8, and A11 patterns with average pillar widths of 33 ± 4 nm, 55 ± 5 nm, and 73 ± 14 nm, respectively, were formed. All the fabrication processes including the final cleaning can be finished within 4 h. All nanostructured quartz surfaces exhibited contact angles higher than 155° with minimal water droplet adhesiveness and enhanced transparency (due to antireflectivity) over a broad spectral range from 350 to 900 nm. Furthermore, A2 pattern showed an enhanced antireflective effect that extends to the deep-UV range near 190 nm, which is a drawback region in conventional thin-film-coating approaches as a result of thermal damage. Because, by changing the conditions of successive RIE, the geometrical configurations of nanostructure arrays can be easily modified to meet specific needs, the newly developed fabrication method is expected to be applied in various optic and opto-electrical areas.PACS codes: 06.60.Ei; 81.65.Cf; 81.40.Vw.

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Size-controllable quartz nanostructure for signal enhancement of DNA chip

Cited by 13 publications

References 22 publications

P‐194: Control of the Viewing Angle Dependence by Inserting of Scattering Layer on Microcavity OLEDs

P‐194: Control of the Viewing Angle Dependence by Inserting of Scattering Layer on Microcavity OLEDs

P‐161L: Late‐News Poster: High‐Efficiency Inverted Top‐Emitting Organic Light‐Emitting Diodes with Random Corrugated Structure

A simple and fast fabrication of a both self-cleanable and deep-UV antireflective quartz nanostructured surface

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