1995
DOI: 10.1063/1.1145930
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Soft x-ray scanning microtomography with submicrometer resolution

Abstract: Scanning soft x-ray microtomography was used to obtain high-resolution three-dimensional images of a microfabricated test object. Using a special rotation stage mounted on the scanning transmission x-ray microscope at the XlA beamline at the National Synchrotron Light Source, we recorded nine two-dimensional projections of the 3D test object over an angular range of -50" to +55". The x-ray wavelength was 3.6 nm and the radiation dose to the object per projection was approximately 2X 10" Gy. The object consiste… Show more

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Cited by 16 publications
(8 citation statements)
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“…In addition, scanning transmission X-ray microscopes (STXMs) operating at the National Synchrotron Light Source and Advanced Photon Source have been used for nano-tomography. The latest laboratory-based X-ray nano-tomography can achieve a resolution of 400 nm with detectability of 100-200 nm (McNulty et al, 1995;Warwick et al, 1998;Cai et al, 2000;Parkinson and Sasov, 2008). Recently, X-raymicro-tomography has been used to quantify liquid water saturation distribution in porous GDLs and determining the Q1 two-phase material parameters with a sub 10 mm resolution (Becker et al, 2008;Sinha et al, 2006).…”
Section: Introductionmentioning
confidence: 99%
“…In addition, scanning transmission X-ray microscopes (STXMs) operating at the National Synchrotron Light Source and Advanced Photon Source have been used for nano-tomography. The latest laboratory-based X-ray nano-tomography can achieve a resolution of 400 nm with detectability of 100-200 nm (McNulty et al, 1995;Warwick et al, 1998;Cai et al, 2000;Parkinson and Sasov, 2008). Recently, X-raymicro-tomography has been used to quantify liquid water saturation distribution in porous GDLs and determining the Q1 two-phase material parameters with a sub 10 mm resolution (Becker et al, 2008;Sinha et al, 2006).…”
Section: Introductionmentioning
confidence: 99%
“…; ሺ݆ ൌ ‫,ݔ‬ ‫,ݕ‬ ‫ݖ‬ሻ [4] Flow is assumed to have reached steady state when the tolerance Ω ൏ 10 ିହ is satisfied.…”
Section: Calculation Of Fluid Transport Parametermentioning
confidence: 99%
“…X-ray images can be generated using high resolution microtomography and nanotomography scanners. The former provides a resolution of 1-10 m, while the later can produce a resolution less than 100 nm [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…The former provides a resolution of 1-10 lm, while the later can produce a resolution 100 nm. Recently, X-ray nanotomography at resolution of 700 nm has been used to determine the two-phase material parameters of a GDL [3][4][5][6][7][8]. Here, an Xray nanotomographical technique with 680 nm resolution has been used on GDL layers to determine the structural and fluid transportation parameters of a real GDL structure.…”
Section: Introductionmentioning
confidence: 99%