2019
DOI: 10.1039/c9ra01695c
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Solidly mounted resonator sensor for biomolecule detections

Abstract: We report the fabrication of a solidly mounted resonator (SMR) that can also function as a sensor for biological molecules.

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Cited by 8 publications
(2 citation statements)
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“…Another approach was demonstrated by Han et al that combined a Bragg acoustic reflector with an Au electrode and an aluminum nitride piezoelectric thin film, to develop a biosensor for anti-human IgG detection by immobilization of the human IgG antibody onto the modified Au electrode. The sensing platform was able to detect antihuman IgG concentrations smaller than 0.4 mg/mL [24]. The sensing platform presented in this work is able to detect the referenced target below to 0.1 µg/mL.…”
Section: Affinity and Slectivity Assaysmentioning
confidence: 85%
“…Another approach was demonstrated by Han et al that combined a Bragg acoustic reflector with an Au electrode and an aluminum nitride piezoelectric thin film, to develop a biosensor for anti-human IgG detection by immobilization of the human IgG antibody onto the modified Au electrode. The sensing platform was able to detect antihuman IgG concentrations smaller than 0.4 mg/mL [24]. The sensing platform presented in this work is able to detect the referenced target below to 0.1 µg/mL.…”
Section: Affinity and Slectivity Assaysmentioning
confidence: 85%
“…[1][2][3][4] As bulk acoustic wave (BAW) devices operating in the GHz range, FBARs have attracted much attention due to their small size, high operating frequency and potential applications in high-frequency communication and mass-sensitive sensor areas. [5][6][7][8] As a kind of FBAR, solidly mounted resonators (SMRs) are composed of a piezoelectric layer sandwiched between electrodes and Bragg reector consisting of alternating high and low acoustic impedance quarter-wavelength thick dielectric or metallic layers. 9,10 The SMR, with good mechanical strength and excellent acoustic properties, and being closer to CMOS integration, was therefore chosen in this work.…”
Section: Introductionmentioning
confidence: 99%