“…However, most of the research works for film metrology using interferometry have been focused on low-coherence interferometry (LCI) [ 63 , 64 , 65 , 66 , 67 , 68 , 69 , 70 , 71 , 72 , 73 , 74 , 75 , 76 , 77 , 78 , 79 , 80 , 81 , 82 , 83 , 84 , 85 , 86 ], which has the significant benefit to obtain absolute distances and lengths, and it is suitable for measuring the thicknesses of transparent plates and film layers. LCI can be typically categorized as a scanning interferometer and a spectral interferometer by the operating principle.…”