2008
DOI: 10.1063/1.2938720
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Spatial evolution of an ion beam created by a geometrically expanding low-pressure argon plasma

Abstract: The spatial distribution of an ion beam—created at the interface of a small diameter plasma source and much larger diameter diffusion chamber—is studied in a low-pressure inductively coupled plasma using a retarding field energy analyzer. It is found that the ion beam density decays axially and radially in the diffusion chamber following the expansion of the plasma from the source region. The radial distribution of the ion beam indicates that the acceleration region has a convex shape and is located just outsi… Show more

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Cited by 20 publications
(19 citation statements)
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“…As previously suggested, 17 the convex potential structure can also cause the diverging ion beam. The measurement of the two-dimensional potential structure including the DL and the source tube is our next challenge.…”
mentioning
confidence: 72%
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“…As previously suggested, 17 the convex potential structure can also cause the diverging ion beam. The measurement of the two-dimensional potential structure including the DL and the source tube is our next challenge.…”
mentioning
confidence: 72%
“…Regarding the spatial distribution of the ion beam, spatially resolved energy analyzer measurements have been reported. The results in the magnetically expanding plasma have shown the weakly diverging ion beam 15,16 while the strongly diverging one has been detected in the geometrically expanding plasma, 17 where it is important to know what decides the beam divergence.…”
mentioning
confidence: 99%
“…5(b) also shows the accelerated group of the beam ions at V c ∼ 25 V corresponding to the upstream plasma potential in Fig. 4(b), in addition to the background ions at V c ∼ 12 V. The ion acceleration by the Boltzmann electric field has been observed in many experiments on simple ICP devices; these showed two types of the IEDF having the beam ions and the hot-tail ions [7], [8], [16]- [19]. The shape of the IEDF is relevant to the charge-exchange process, which is discussed here qualitatively because we have now no information on the spatial variation of the neutral pressure.…”
Section: Resultsmentioning
confidence: 99%
“…In magnetically expanding plasmas, supersonic ion beams accelerated by currentfree DLs are detected at the downstream side of the DLs, where a rapid potential drop with thickness of about several tens to several hundreds of Debye length is formed near the open end of the plasma sources [1]- [6]. On the other hand, the DL has not been observed in the series of experiments on a geometrically expanding plasma, but an ion beam accelerated by the Boltzmann electric field is detected [7], [8].…”
mentioning
confidence: 97%
“…19 In contrast with the magnetically expanding plasmas, the hemispherical expansion in the "geometrically" expanding plasma has shown the generation of the strongly divergent ion beam, which is guessed to be due to the hemispherical plasma-potential structures. 20,21 In the present letter, we report a variation in the plasmapotential structure from a plane shape to a hemispherical shape when increasing the gas pressure in the magnetically expanding plasma, which is directly associated with the divergence of the ion beam. The results demonstrate the trajectory of the ions accelerated by the potential drop is dominated by the potential structure while it is found the electrons overcoming the potential drop move along the magnetic-field lines.…”
mentioning
confidence: 98%