Spatial evolution of the electron-energy distribution in the vicinity of a discharge-tube constriction

Godyak, Valery; Lagushenko, R.; Maya, J.

doi:10.1103/physreva.38.2044

Cited by 46 publications

(15 citation statements)

References 12 publications

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“…Similar local disturbances may be caused also by constrictions, grids or geometrical changes of the discharge tube. Some papers can be found in the literature (1,2) which report on experimental investigations of the response of glow discharge plasmas on constrictions of the discharge tube.…”

Section: Introductionmentioning

confidence: 99%

Self-Consistent Analysis of the Spatial Relaxation of a Disturbed Neon Glow Discharge

Arndt

Sigeneger

Testrich

et al. 2005

Plasma Chem Plasma Process

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The response of a neon glow discharge plasma on a disturbance caused by a floating Langmuir probe is studied by a fully self-consistent, spatially one-dimensional hybrid method as well as by measurements. The theoretical description is based on the coupled solution of the hydrodynamic equations of electrons, ions, and excited atoms and the Poisson equation. The space-dependent transport and rate coefficients of the electron component are determined by a strict solution of the non-uniform electron kinetic equation. For the measurements, a probe was inserted in radial direction into the discharge several cm in front of the anode. The spatial evolution of the densities of the excited atoms in the 1s 3 , 1s 5 , and 2p 8 states was determined by spectroscopic methods. Pronounced modulations of basic plasma parameters have been observed around the probe, decaying periodically and damped toward the anode. The measured density profiles of the excited atoms agree well with the numerically determined ones. The analysis of the electron kinetic quantities shows that the response of the plasma to the disturbance is widely determined by the nonlocal behaviour of the electrons in the distinctly disturbed electrical field.

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Section: Introductionmentioning

confidence: 99%

Self-Consistent Analysis of the Spatial Relaxation of a Disturbed Neon Glow Discharge

Arndt

Sigeneger

Testrich

et al. 2005

Plasma Chem Plasma Process

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“…However, it is uncertain whether the criterion is appropriate in all cases of plasma sources. Godyak et al [22] and Hartig and Kushner [23] reported that nonlocal coupling occurs in the regime where EERL = chamber length. Therefore, the criteria for determining the electron kinetics regime should be evaluated in some other plasmas.…”

Section: Antenna Size Effect On the Electron Kineticsmentioning

confidence: 99%

A Brief Review of Electron Kinetics in Radio-Frequency Plasmas

Lee

2019

ASCT

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“…The plasma probe station has been previously described in its application to dc discharges. 15,16 Measurement ofEEDF in rf discharges has been discussed in a review article. 14 …”

Section: Experimental Rl Diagnostic and Data Acquisition Systemmentioning

confidence: 99%

An experimental system for symmetric capacitive rf discharge studies

Godyak¹,

Piejak²,

Alexandrovich³

1990

Review of Scientific Instruments

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An experimental system has been designed and built to comprehensively study the electrical and plasma characteristics in symmetric capacitively coupled rf discharges at low gas pressures. Descriptions of the system concept, the discharge chamber, the vacuum-gas control system, and the rf matching and electrical measurement system are presented together with some results of electrical measurements carried out in an argon discharge at 13.56 MHz. The system has been specifically designed to facilitate external discharge parameter measurements and probe measurements and to be compatible with a wide variety of other diagnostics. External electrical measurements and probe measurements within the discharge show that it is an ideal vehicle to study low-pressure rf discharge physics. Measurements from this system should be comparable to one-dimensional rf symmetric capacitive discharge theories and may help to verify them. Although only a few results are given here, the system has been operated reliably over a wide range of gas pressures and should give reproducible and accurate results for discharge electrical characteristics and plasma parameters over a wide range of driving frequency and gas components.

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Spatial evolution of the electron-energy distribution in the vicinity of a discharge-tube constriction

Cited by 46 publications

References 12 publications

Self-Consistent Analysis of the Spatial Relaxation of a Disturbed Neon Glow Discharge

Self-Consistent Analysis of the Spatial Relaxation of a Disturbed Neon Glow Discharge

A Brief Review of Electron Kinetics in Radio-Frequency Plasmas

An experimental system for symmetric capacitive rf discharge studies

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