Special issue: Plasmas for microfabrication

Hamaguchi, Satoshi; Agarwal, Sumit; Zajı́čková, Lenka; Wertheimer, M. R.

doi:10.1002/ppap.201990001

Cited by 2 publications

(3 citation statements)

References 14 publications

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“…In addition, the technique we propose pertains to atmospheres with a different gas composition and/or pressure level. Furthermore, low power continuous wave operation ensures ease of implementation and paves the way for a range of applications such as controlling high voltage systems 1 , microfabrication and machining 3 , 4 , precision microsurgery and cancer treatment 8 – 12 , and controlling atmospheric lightning 2 , 33 .…”

Section: Discussionmentioning

confidence: 99%

“…Electrical discharge in gases is manifested in a wide range of high voltage systems 1 and natural lightning phenomena 2 . Plasma discharges play a vital role in materials deposition and fabrication techniques 3 , 4 —the backbone of nanotechnology and semiconductor electronics. High voltage discharges are of fundamental significance for accelerator physics and high energy photon sources 5 – 7 .…”

Section: Introductionmentioning

confidence: 99%

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Optical beaming of electrical discharges

et al. 2020

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Igniting and guiding electrical discharges to desired targets in the ambient atmosphere have been a subject of intense research efforts for decades. Ability to control discharge and its propagation can pave the way to a broad range of applications from nanofabrication and plasma medicine to monitoring of atmospheric pollution and, ultimately, taming lightning strikes. Numerous experiments utilizing powerful pulsed lasers with peak-intensity above air photoionization and photo-dissociation have demonstrated excitation and confinement of plasma tracks in the wakes of laser field. Here, we propose and demonstrate an efficient approach for triggering, trapping and guiding electrical discharges in air. It is based on the use of a low-power continuous-wave vortex beam that traps and transports light-absorbing particles in mid-air. We demonstrate a 30% decrease in discharge threshold mediated by optically trapped graphene microparticles with the use of a laser beam of a few hundred milliwatts of power. Our demonstration may pave the way to guiding electrical discharges along arbitrary paths.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Optical beaming of electrical discharges

et al. 2020

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“…The development of plasma science and technology has significantly emphasized plasma-assisted microfabrication, particularly since the 1970s. This growing tendency can be largely attributed to "Moore's Law," which states that the number of transistors in a compact integrated circuit doubles approximately every two years [12]. Low pressure, NTPs have several significant uses in the processing of semiconductors for producing microelectronic devices and integrated circuits.…”

Section: Microfabricationmentioning

confidence: 99%