“…This changing leads to decreasing of elements integrated circuits [Pankratov and Bulaeva, 2013]. One way to increase performance of elements of integrated circuits is determination of materials with higher values of charge carriers mobility [Stepanenko, 1980;Alexenko and Shagurin, 1990;Gotra, 1991;Avaev et al, 1991;Lachin and Savelov, 2001;Polishscuk, 2004;Volovich, 2006;Kerentsev and Lanin, 2008;Ageev et al, 2009;Tsai et al, 2009;Gol'dman et al, 2011;Peng et al, 2006;Ou-Yang et al, 2010;Wang et al, 2012;Alexandrov et al, 1998;Ermolovich et al, 2009;Sinsermsuksakul et al, 2013;Reynolds et al, 2013]. Another way to increase the performance is elaboration of new technological processes and modification of the existing one.…”