Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Schilt, Stéphane; Zogal, Karolina; Kögel, Benjamin; Meißner, P.; Maute, M.; Protasio, Rui; Amann, Markus‐Christian

doi:10.1007/s00340-010-3898-9

Cited by 12 publications

(7 citation statements)

References 20 publications

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“…However, suppliers must still invest in a full wafer in order to produce a single device at any given wavelength. MEMS based VCSELs are under development; by adding a MEMS-actuated mirror to the top of the VCSEL, the tuning range is increased to 20 nm [3]. Manufacturing tolerances may be widened, thereby improving yields, and the ability to detect multiple gas species potentially increases the market.…”

Section: Introductionmentioning

confidence: 99%

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Spectroscopic gas detection using a Bragg grating - stabilized external cavity laser, custom written in planar integrated silica-on-silicon

Davis¹,

Lynch²,

Gates³

et al. 2019

Opt. Express

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We present the development of an external cavity Bragg grating stabilized laser for tunable diode laser spectroscopy (TDLS). Our design uses a planar integrated silica-on-silicon platform incorporating a custom written Bragg grating as the wavelength-selective element of the laser cavity. We have developed a prototype singlemode laser at 1651 nm and performed a detailed characterization of its performance for the purpose of spectroscopic measurement of methane at this wavelength using a 25 cm path-length single-pass cell. Mode hop-free tuning of 0.13 nm has been demonstrated at frequencies of up to 10 kHz. A single-point limit of detection for TDLS of ∆I/I 0 = 8.3 × 10 −5 AU was achieved, which is consistent with the performance of standard distributed feedback lasers. The new device exhibits a side-mode suppression ratio of −40 dB and a low RIN of <−150 dB/Hz, and thus avoids the high levels of noise or instability normally associated with larger, mechanically driven external cavity lasers. The silica-on-silicon platform has the potential for low-volume manufacturing of special lasers at the custom wavelengths required for gas detection, without the need for investment in foundry solutions.

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Section: Introductionmentioning

confidence: 99%

“…External cavity diode lasers (ECDLs) offer narrow linewidth operation and single-mode output with the ability to tune over a wide wavelength range [3]. The gain medium is a broadband gain chip, which is commercially available especially in the near IR region.…”

Section: Introductionmentioning

confidence: 99%

Spectroscopic gas detection using a Bragg grating - stabilized external cavity laser, custom written in planar integrated silica-on-silicon

Davis¹,

Lynch²,

Gates³

et al. 2019

Opt. Express

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show abstract

“…Small volume of the lasing material in VCSELs means that their emission wavelength can be very rapidly currenttuned over ranges exceeding 1 nm, which allows several absorption transitions to be covered in a single wavelength scan [4,5]. Furthermore, for micro-electro-mechanical-system VCSELs where the cavity can be tuned by an electro-thermal actuation of the MEMS mirror [6], it is possible to achieve continuous tuning range close to 50 nm [7].…”

Section: Introductionmentioning

confidence: 99%

Comparative analysis of GaAs- and GaSb-based active regions emitting in the mid-infrared wavelength range

Piskorski¹,

Frasunkiewicz²,

Sarzała³

2015

Bulletin of the Polish Academy of Sciences Technical Sciences

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Abstract. In the present paper the results of the computer analysis of the GaAs-based and GaSb-based active regions that can be applied in compact semiconductor laser sources of radiation at mid-infrared wavelengths are presented. Quantum well material contents and strain dependencies on the maximal gain are investigated. It is shown that above 3 µm the maximal gain obtained for GaInNAs/AlGaInAs active region is high only for thick, highly-strained GaInNAs QWs with N concentration higher than 2%. Much higher gain in this wavelength range can be obtained for GaInAsSb/AlGaAsSb active region, which offers relatively high gain even at 4.5 µm when the Sb content in GaInAsSb and compressive strain in this layer are equal to 50% and -2%, respectively.

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“…Micromachined Fabry–Pérot interferometers are widely used in the optical telecommunication building blocks such as tunable filters and wavelength‐division or add‐drop multiplexers . They are also used to form laser cavities and perform high‐resolution spectroscopy . Fabry–Pérot interferometers were found to be effective for the measurement of the volume refractive index of a fluid within the cavity , embedded biological cells or polymers interacting with the chemical environment .…”

Section: Introductionmentioning

confidence: 99%

Monolithic silicon‐micromachined free‐space optical interferometers onchip

Sabry

Khalil

Bourouina

2014

Laser & Photonics Reviews

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The integration of microactuators within a silicon photonic chip gave rise to the field of optical micro‐electro‐mechanical systems (MEMS) that was originally driven by the telecommunication market. Following the latter's bubble collapse in the beginning of the third millennium, new directions of research with considerable momentum appeared focusing on the realization and applications of miniaturized instrumentation in biology, chemistry, physics and materials science. At the heart of these applications light interferometry is a key optical phenomenon, in which miniaturized scanning interferometers are the manipulating optical devices. Monolithic free‐space optical interferometers realized on a silicon chip take advantage of the recent progress in the microfabrication technology that is enabling accurate control of the etching depth, the aspect ratio, the verticality and the curvature of the etched surfaces. The fabrication technology, the library of micro‐optical and mechanical components, the realized architectures and their characterization are described in detail in this review, followed by a discussion of the foreseen challenges.

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Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Cited by 12 publications

References 20 publications

Spectroscopic gas detection using a Bragg grating - stabilized external cavity laser, custom written in planar integrated silica-on-silicon

Spectroscopic gas detection using a Bragg grating - stabilized external cavity laser, custom written in planar integrated silica-on-silicon

Comparative analysis of GaAs- and GaSb-based active regions emitting in the mid-infrared wavelength range

Monolithic silicon‐micromachined free‐space optical interferometers onchip

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