Spectral interferometry for thin film information by fitting Fourier transform spectrum

Dong, Bozhang; Xia, Min; Guo, Wenping; Yang, Kecheng

doi:10.1117/12.2688647

Optical Metrology and Inspection for Industrial Applications X 2023

DOI: 10.1117/12.2688647

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Spectral interferometry for thin film information by fitting Fourier transform spectrum

Bozhang Dong,

Min Xia,

Wenping Guo

et al.

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Spectral interferometry for thin film information by fitting Fourier transform spectrum

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References 12 publications

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