2021
DOI: 10.1016/j.nima.2021.165731
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“Spiral COSAMI” — A Multi-Undulator Compact Source for Actinic Mask Inspection in the extreme ultraviolet range

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Cited by 2 publications
(2 citation statements)
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“…Example 1: The Spiral-COSAMI storage ring is a machine for industrial application of extreme ultraviolet light [8]. It is build from three vertically stacked turns as sketched in lattice how the vertical emittance increases due to orbit distortion when exciting one vertical corrector.…”
Section: Applicationsmentioning
confidence: 99%
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“…Example 1: The Spiral-COSAMI storage ring is a machine for industrial application of extreme ultraviolet light [8]. It is build from three vertically stacked turns as sketched in lattice how the vertical emittance increases due to orbit distortion when exciting one vertical corrector.…”
Section: Applicationsmentioning
confidence: 99%
“…The beam optics code OPA [7], written and maintained by one of the authors, is tailored to interactively design beam optical systems. Especially for the initial design phase, estimating the equilibrium beam properties from the optics of a non-periodic system, helps to guide the optimization; and this requires the evaluation of the radiation integrals, especially for intrinsically coupled lattices, such as Spiral-COSAMI [8].…”
Section: Introductionmentioning
confidence: 99%