Spray-Pyrolysis Fabrication and Quality Study of β-Ga2O3 Thin Films

Abstract

In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.

Effect of Solution Composition on the Morphology of Synthesized β-Ga2O3 Particles

“…Gallium oxide can crystallize into different polymorphic forms -α-, β-, γ-, δ-, ε-, κ-phases of Ga2O3 are known [9] -which have different band gaps and crystalline structures [2,3,[10][11][12][13]. The monoclinic β-Ga2O3 is of the greatest interest, as it is the most thermally and chemically stable [5,11,[13][14][15][16]. Since β-Ga2O3 has good resistance to alkalis and acids, it is promising for use as the active material of gas sensors, photodetectors and photocatalysts that maintain performance under the influence of aggressive media [17,18].…”