2023
DOI: 10.3390/s23104665
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Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles

Abstract: In the present paper, we have analytically explored the small variations of the local pressure in the trapped air film of both sides of the clamped circular capacitive micromachined ultrasonic transducer (CMUT), which consists of a thin movable membrane of silicon nitride (Si3N4). This time-independent pressure profile has been investigated thoroughly by solving the associated linear Reynold’s equation in the framework of three analytical models, viz. membrane model, plate model, and non-local plate model. The… Show more

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Cited by 2 publications
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Section: Key Dimensions Of It Project Management Excellencementioning
confidence: 99%
“…Moreover, IT project management excellence enables organizations to leverage technology solutions to address sustainability challenges and opportunities. For example, the adoption of cloud computing [35], data analytics, and Internet of Things (IoT) [36,37] technologies can help organizations optimize energy consumption, improve agility, and enhance resource efficiency in their operations [38][39][40][41].…”
Section: Key Dimensions Of It Project Management Excellencementioning
confidence: 99%