2010
DOI: 10.1103/physrevb.81.132103
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Stabilization of Ge-rich defect complexes originating fromEcenters inSi1xGex:

Abstract: Thermal evolution of vacancy complexes was studied in P-doped ͓͑P͔ =10 18 cm −3 ͒ proton irradiated Si 1−x Ge x with Ge contents of 10%, 20%, and 30% in the range of 250-350°C using positron annihilation spectroscopy. The radiation damage recovers in the course of anneals but the final state differs from that in as-grown samples indicating the presence of small Ge clusters in the samples, contrary to the initially random Ge distribution. The activation energy for the annealing process was estimated to be 1.4Ϯ … Show more

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Cited by 14 publications
(12 citation statements)
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“…This is due to the ability of the E-center in SiGe to gather Ge as it becomes mobile. The effect is more significant, as expected, in the samples with the smallest Ge concentration, where the effect of the change in Ge distribution differs most from the as-grown random alloy [27].…”
Section: The E-center In Sigesupporting
confidence: 61%
See 2 more Smart Citations
“…This is due to the ability of the E-center in SiGe to gather Ge as it becomes mobile. The effect is more significant, as expected, in the samples with the smallest Ge concentration, where the effect of the change in Ge distribution differs most from the as-grown random alloy [27].…”
Section: The E-center In Sigesupporting
confidence: 61%
“…In Ref. [27] the dissociation of the E-center in proton irradiated SiGe has been studied as a function of time and temperature. By fitting a kinetic model to the measured S-parameters a dissociation energy can be obtained.…”
Section: The E-center In Sigementioning
confidence: 99%
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“…[1][2][3][4][5] An enabling factor is the advent of high dielectric constant (high-k) dielectrics that allow the departure from the prerequisite to use native oxides such as SiO 2 in Si-based devices. [6][7][8] Si 1-x Ge x is a random alloy with the diamond structure that has one lattice site that can be occupied by either Si or Ge.…”
Section: Introductionmentioning
confidence: 99%
“…This powerful method of detailed defect identification has been recently used for a range of materials. The identification of V In -nV N complexes in InN [71], Li-and H-related defects in ZnO [72], analysis of E-center-Ge complexes in SiGe [73], and shedding light on the vacancy clusters in SiC [74] serve as good examples. On the research in metals or alloys, the emphasis has been on studying vacancy-induced precipitation of impurities and alloy elements, such as Cu in Fe or Mg in Al [75].…”
Section: Positron Annihilation Spectroscopymentioning
confidence: 99%