2024
DOI: 10.1116/6.0003368
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Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits

Zengqian Ding,
Boyi Zhou,
Tao Wang
et al.

Abstract: The presence of amorphous oxide layers can significantly affect the coherent time of superconducting qubits due to their high dielectric loss. Typically, the surface oxides of superconductor films exhibit lossy and unstable behavior when exposed to air. To increase the coherence time, it is essential for qubits to have stable and low dielectric loss oxides, either as barrier or passivation layers. In this study, we highlight the robust and stable nature of an amorphous tantalum oxide layer formed on α-Ta (110)… Show more

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