2009
DOI: 10.1007/s12647-009-0014-x
|View full text |Cite
|
Sign up to set email alerts
|

Static expansion primary vacuum standard — Part 2: Characterization of two spinning rotor gauges

Abstract: The Part 1 of this paper discussed the determination of the volume ratio of the Static Expansion Primary Vacuum Standard (SES). Part 2 of the paper discusses in detail the use of the SES thus characterized for generating primary pressures. This standard has been used to calibrate Spinning Rotor Gauges (SRGs) at a number of pressures in the range 0.1 Pa to 1 Pa in steps of 0.1 Pa. The Gauge Coefficient at each of these pressures, defined as equal to the ratio of the indicated pressure to the true pressure is th… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 11 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?