“…[19,22] Films were grown at 760 °C /0.1 mTorr O 2 , 740 °C/10 −6 Torr vacuum, and 650 °C/500 mTorr O 2 for BLSO, LSTO, and LSCO, respectively, which yielded deposition rates of 1.72 nm min −1 (BLSO), 2.14 nm min −1 (LSTO), and 1.15 nm min −1 (LSCO). Ba 0.97 La 0.03 SnO 3 and La 0.7 Sr 0.3 CoO 3−δ films were deposited using polycrystalline Ba 0.95 La 0.05 Sn 1.1 O 3 and La 0.7 Sr 0.3 CoO 3 targets, respectively, while La 0.04 Sr 0.96 TiO 3 films were deposited using La 0.05 Sr 0.95 TiO 3 single crystal targets.…”