Stress anisotropy in circular planar magnetron sputter deposited molybdenum films and its annealing effect

Wu, Yao; Cao, Erhua; Wang, Z.S.; Wei, Jiandong; Tang, Wei; Chen, L.Y.

doi:10.1007/s003390201314

Cited by 10 publications

(6 citation statements)

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“…These kinds of micrometre-sized patterns were also reported by Wu et al using an optical microscope [16]. The Mo films reported here showed nanometre sizes clusters that have nano-structured stress relief patterns.…”

Section: Accepted M Manuscriptsupporting

confidence: 87%

“…In our case we have deposited films at the lowest pressure possible (7.0 x10 -1 Pa) and they were found to be well adhered to the glass substrate. A range of work has been reported on the stress/ strain related issues of films and their mechanical and electrical behaviour following deposition by the normal d.c sputtering method [2,[13][14][15][16][17]. There have been no studies conducted on the effect of stress or strain in pulsed d.c. magnetron sputtered films, especially from powdered targets.…”

Section: Accepted M Manuscriptmentioning

confidence: 99%

“…The main concern about high tensile strain or str ess in films is that it usually leads to cracking a nd subsequent peeling off fr om the substrate [6,16] . The greater the thickness the greater will be the cracking / peeling of f force for a given level of stre ss.…”

Section: Accepted M Manuscriptmentioning

confidence: 99%

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Nano-structured morphological features of pulsed direct current magnetron sputtered Mo films for photovoltaic applications

2011

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Nano-structured morphological features of pulsed direct current magnetron sputtered Mo films for photovoltaic applications, Thin Solid Films (2011Films ( ), doi: 10.1016Films ( /j.tsf.2011 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. Cu(In,Ga)Se 2 based solar cells and as such the properties of these layers play an important role in the overall cell structure. This paper describes the production of molybdenum films using pulsed d.c magnetron sputtering from compressed molybdenum powder targets. The films were deposited at different substrate temperatures under constant power and constant current modes, and analysed using X-ray diffraction, scanning electron microscopy, atomic force microscopy and four point resistance probe. Mechanical strain and resistivity were found to decrease with substrate temperature together with a shift in the (110) crystallographic plane towards higher diffraction angles. All films were well adhered to the glass substrates irrespective of their high tensile strain. Surface morphology analysis revealed the presence of nano-structured stress relief patterns which can enhance the nucleation sites for subsequent CuInSe 2 deposition. A high-resolution cross sectional image showed the columnar growth of the films. Surface roughness analysis revealed that roughness increased with increase in substrate temperature. A C C E P T E D M A N U S C R I P T ACCEPTED MANUSCRIPT KeywordsMolybdenum films, Pulsed D.C. Magnetron Sputtering, nano-structured stress relief pattern, powder sputtering, back contact layer.

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Section: Accepted M Manuscriptsupporting

confidence: 87%

Section: Accepted M Manuscriptmentioning

confidence: 99%

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Nano-structured morphological features of pulsed direct current magnetron sputtered Mo films for photovoltaic applications

2011

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“…As shown [18], the concentration of stresses near the interface of "coating -substrate" within a thin surface layer (80 microns) increases with decreasing thickness of the coating i. e. closer to the free surface of the sample. Thus, a decrease of the cell size by reducing the thickness may be associated with increasing levels of elastic stress-strain state in the coating.…”

Section: The Results Of Studies Of the System Tib 2 -Wb 2 Ion-plasma mentioning

confidence: 86%

Use of computer processing by the method of multi-threshold cross sections for the analysis of optical images of fractal surface microstructure

Kolupaev

Sоbоl

Murakhovski

et al. 2016

EEJET

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“…23). The individual dome-shaped film sections are evidence of high compressive deformation in a condensate [43]. Fig.…”

Section: Fractal Studying Of Surfacementioning

confidence: 95%

Multifunctional Ceramic Nanostructured Coatings

Pugachov¹

2010

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing the burden, to Department of Defense, Washington Headquarters Services, Directorate for Information SPONSOR/MONITOR'S ACRONYM(S) SPONSOR/MONITOR'S REPORT NUMBER(S)AFRL-AFOSR-UK-TR-2010-0006 DISTRIBUTION/AVAILABILITY STATEMENTApproved for public release; distribution is unlimited. SUPPLEMENTARY NOTES ABSTRACTThis report results from a contract tasking National Technical University 'Kharkov Polytechnical Institute' as follows: The project is devoted to creating the new class of high-efficiency wear-resistant ion-plasma coatings based on transition metal borides for application under extreme conditions. The main idea of the project: providing the necessary properties of the materials due to controlling the phase composition, structure and stress state during their formation from ion-plasma fluxes. SUBJECT TERMS SummaryThis paper delves into integrated analysis of a structure, substructure, stressed state and some mechanical and physical properties of the films formed by the titanium and tungsten borides and carbides. The analysis was done using the X-ray and electron-optical methods. This information expands our knowledge of the mechanisms that are involved in the formation of condensates using the ion -plasma methods and it is needed for evolving a condensate formation theory using these methods to provide the physical fundamentals for numerous practical applications.In addition, this paper analyzes stability of the structural state and mechanical properties of materials of a new class, i.e. ion-plasma coatings of quasi-binary systems subjected to the influence of factors peculiar for the open space.

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Stress anisotropy in circular planar magnetron sputter deposited molybdenum films and its annealing effect

Cited by 10 publications

References 0 publications

Nano-structured morphological features of pulsed direct current magnetron sputtered Mo films for photovoltaic applications

Nano-structured morphological features of pulsed direct current magnetron sputtered Mo films for photovoltaic applications

Use of computer processing by the method of multi-threshold cross sections for the analysis of optical images of fractal surface microstructure

Multifunctional Ceramic Nanostructured Coatings

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