Stress Isolation Suspension for Silicon-on-Insulator 3-Axis Accelerometer Designed by Topology Optimization Method

Fujiyoshi, Masato; Kawamoto, Atsushi; Hashimoto, S.; Omura, Y.; Funabashi, Hirofumi; Ohira, Yoshie; Hata, Yoshiyuki; Ozaki, Takashi; Akashi, T.; Nonomura, Yutaka; Nakayama, Takahiro; Yamada, Hitoshi

doi:10.1109/jsen.2022.3141805

Cited by 5 publications

(4 citation statements)

References 34 publications

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“…The article [22] proposes an energy-aware and trust-based routing protocol for WSNs, leveraging adaptive genetic algorithms for resisting routing attacks and minimising energy consumption triggered by data transmission. The authors [23] focus on a topology optimisation method (TOM) needed for precise multi-axis inertia sensing needed in self-positioning autonomous robot control. The work [24] explores a soft sensing optimisation scheme for detecting obstacles and discriminating the scalable obstacles using an untethered miniature, soft, C-legged robot, M-SQuad, the first modular C-legged quadruped consisting of three modules.…”

Section: Literature Reviewmentioning

confidence: 99%

Smart deployment of IoT-TelosB service care StreamRobot using software-defined reliability optimisation design

Okafor

Longe

2022

Heliyon

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Section: Literature Reviewmentioning

confidence: 99%

Smart deployment of IoT-TelosB service care StreamRobot using software-defined reliability optimisation design

Okafor

Longe

2022

Heliyon

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“…Stress isolation is a common technique used in the design of MEMS (Micro Electro Mechanical Systems) devices to mitigate the side effects of temperature and vibrations [6], such as those found in gyroscopes [7], accelerometers [8], pressure sensors [9], resonators [10], and so on [11,12]. These applications shown that stress isolation had been a critical technique in the design and operation of MEMS devices, as it helps to ensure the accurate and reliable measurements necessary for their intended usages.…”

Section: Introductionmentioning

confidence: 99%

Stress isolations for resonant pressure micro sensors

Lu,

Xie,

Chen

et al. 2024

J. Phys.: Conf. Ser.

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This paper presents stress isolations for resonant pressure micro sensors that are supported by fixed isolation layers during assembly. While the resonant frequencies of the two resonators experience shifts due to measured pressures, they are susceptible to environmental perturbations. The proposed stress-isolated assembly in this study effectively mitigates the adverse effects of environmental noise and stabilizes the intrinsic frequencies of the resonators. Specifically, when subjected to temperature variations within the range of -55∼85 °C, the accuracy of the stress-isolated resonant pressure microsensor was determined to be ±0.01% FS. Similarly, during 3-axis random vibration tests, the accuracy of these stress-isolated resonant pressure microsensors was quantified as ±0.01% FS in response to environmental vibrations.

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“…At present, there are three main measures to reduce the stress effect for accelerometers. First, stress isolation can be achieved by adding a stress isolation frame and stress isolation beam, or by low-stress encapsulation [11][12][13]. Second, the effect of in-plane stress is reduced by stress difference using differential symmetry structures [14].…”

Section: Introductionmentioning

confidence: 99%

Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

Liu

et al. 2023

Micromachines

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This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO2 bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The study includes the development of an accelerometer model and simulation analysis which demonstrates the stress maps of the accelerometer under different anchor–area ratios, which have a strong impact on the performance of the accelerometer. In practical applications, the deformation of the comb structure fixed by the anchor zone is influenced by the stress in the anchor region, causing a distorted nonlinear response signal. The simulation results demonstrate that when the area ratio of the Si-SiO2 anchor zone to the Au-Si anchor zone decreases to 0.5, the stress in the anchor zone decreases significantly. Experimental results reveal that the full-temperature stability of zero-bias is optimized from 133 μg to 46 μg when the anchor–zone ratio of the accelerometer decreases from 0.8 to 0.5. At the same time, the full-temperature stability of the scale factor is optimized from 87 ppm to 32 ppm. Furthermore, zero-bias full-temperature stability and scale factor full-temperature stability are improved by 34.6% and 36.8%, respectively.

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Stress Isolation Suspension for Silicon-on-Insulator 3-Axis Accelerometer Designed by Topology Optimization Method

Cited by 5 publications

References 34 publications

Smart deployment of IoT-TelosB service care StreamRobot using software-defined reliability optimisation design

Smart deployment of IoT-TelosB service care StreamRobot using software-defined reliability optimisation design

Stress isolations for resonant pressure micro sensors

Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer

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