Structural Analysis of Heat‐Treated Chromium Oxycarbide Films

Abstract

Chromium oxycarbide (Cr2CO) films were deposited on stainless steel and copper plates via plasma‐assisted chemical vapor deposition. The films were heated to 1073 K under high‐vacuum conditions, to examine the high‐temperature stability of the films. X‐ray diffractometry revealed that the films decomposed to a mixed structure of Cr2O3 and Cr3C2. Thermogravimetric analysis and differential thermal analysis revealed that the decomposition occurred in the temperature range of 858‐910 K.