Structural and Electrical Properties of Al-Co(Al-N)/AlN-Co Multilayer Films Prepared by Two-Facing-Target Type Sputtering System

Han, Chang-Suk; Bae, Chang-Hwan

doi:10.3740/mrsk.2024.34.10.506

Korean. J. Mater. Res.

2024

DOI: 10.3740/mrsk.2024.34.10.506

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Structural and Electrical Properties of Al-Co(Al-N)/AlN-Co Multilayer Films Prepared by Two-Facing-Target Type Sputtering System

Chang-Suk Han,

Chang-Hwan Bae

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Structural and Electrical Properties of Al-Co(Al-N)/AlN-Co Multilayer Films Prepared by Two-Facing-Target Type Sputtering System

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