Single-phase noncubic Mn-Ga films with a thickness of about 200 nm were fabricated by an in situ annealing of [Mn(x)/Ga(y)/Mn(x)]5 multilayers deposited by e-beam evaporation. Mn-Ga alloys prepared in three different compositions Mn2Ga5 and Mn2Ga were found to crystallize in the tetragonal tP14 and tP2 structures, respectively. Mn3Ga crystallizes in the hexagonal hp8 or tetragonal tI8 structures. All three alloys show substantial magnetocrystalline anisotropy between 7 and 10 Mergs/cm3. The samples show hard magnetic properties including coercivities of Mn2Ga5 and Mn2Ga about 12.0 kOe and of Mn3Ga about 13.4 kOe. The saturation magnetization and Curie temperature of Mn2Ga5, Mn2Ga, and Mn3Ga are 183 emu/cm3 and 435 K, 342 emu/cm3 and 697 K, and 151 emu/cm3 and 798 K, respectively. The samples show metallic electron transport up to room temperature.