Structural and mechanical properties of TaN/a-CNx multilayer films

Chen, R.; Tu, J.P.; Liu, D.G.; Yu, Yating; Qu, Shaoxing; Gu, C.D.

doi:10.1016/j.surfcoat.2011.09.072

Cited by 25 publications

(9 citation statements)

References 46 publications

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“…Very minor deviations of these data also indicate good film quality of TaN–Au. Interestingly, these values for the hybrid TaN–Au film are in the same range with reported values for pure TaN, suggesting that the overall hardness of the hybrid film is based on TaN . Another interesting observation is no crack formation in the SPM images after indentation indicating the ductile nature of the hybrid coatings which is ideal for coating on irregular surfaces.…”

Section: The List Of Theoretical In‐plane (Ip) and Out‐of‐plane (Op) mentioning

confidence: 99%

Nanoscale Artificial Plasmonic Lattice in Self‐Assembled Vertically Aligned Nitride–Metal Hybrid Metamaterials

et al. 2018

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Nanoscale metamaterials exhibit extraordinary optical properties and are proposed for various technological applications. Here, a new class of novel nanoscale two‐phase hybrid metamaterials is achieved by combining two major classes of traditional plasmonic materials, metals (e.g., Au) and transition metal nitrides (e.g., TaN, TiN, and ZrN) in an epitaxial thin film form via the vertically aligned nanocomposite platform. By properly controlling the nucleation of the two phases, the nanoscale artificial plasmonic lattices (APLs) consisting of highly ordered hexagonal close packed Au nanopillars in a TaN matrix are demonstrated. More specifically, uniform Au nanopillars with an average diameter of 3 nm are embedded in epitaxial TaN platform and thus form highly 3D ordered APL nanoscale metamaterials. Novel optical properties include highly anisotropic reflectance, obvious nonlinear optical properties indicating inversion symmetry breaking of the hybrid material, large permittivity tuning and negative permittivity response over a broad wavelength regime, and superior mechanical strength and ductility. The study demonstrates the novelty of the new hybrid plasmonic scheme with great potentials in versatile material selection, and, tunable APL spacing and pillar dimension, all important steps toward future designable hybrid plasmonic materials.

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Section: The List Of Theoretical In‐plane (Ip) and Out‐of‐plane (Op) mentioning

confidence: 99%

Nanoscale Artificial Plasmonic Lattice in Self‐Assembled Vertically Aligned Nitride–Metal Hybrid Metamaterials

et al. 2018

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“…It can be deduced from previous works that nanomultilayer structure can limit crack propagation, leading to high toughness without reducing the hardness. 4,10,17,18 Thereafter it can be inferred that the hard carbon films with graded and nanomultilayered structures simultaneously may display high hardness, high toughness and good adhesion strength. To obtain a better understanding of the hard carbon-based nanomultilayer film applied in medical implant, in this present work, a-C/a-C:Ti nanomultilayer (a-C NM) films were deposited on medical Ti6Al4V alloy by magnetron sputtering under graded bias voltage.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Properties and in Vitro and in Vivo Biocompatibility of a-C/a-C:Ti Nanomultilayer Films on Ti6Al4V Alloy as Medical Implants

Bai

Wang

et al. 2017

ACS Appl. Mater. Interfaces

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Hydrogen-free a-C/a-C:Ti nanomultilayer films are deposited on medical Ti6Al4V alloy using a closed field unbalanced magnetron sputtering under graded bias voltage. The mechanical and tribological properties of the nanomultilayer films are performed on the nanoindentor, Rockwell and scratch tests, and ball-on-disk tribometer. The biological properties are evaluated by cell cytotoxicity, genotoxicity, subchronic systemic toxicity and implant. The hard a-C/a-C:Ti nanomultilayer films on medical alloy exhibit high adhesion strength and excellent tribological properties in both ambient air and Hank's solution. Biocompatibility results reveal the film no cytotoxity, no genotoxicity, no subchronic systemic toxicity and no contraindications in implant systems. Because of excellent mechanical properties and biosafety, the carbon-based films on medical alloy unveils a prospective application in medical implants.

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“…have reported the formation of sp 2 ‐bonded hard amorphous carbon network in 400 keV N + ‐irradiated amorphous carbon and fullerene‐like films. In addition, some works have been made to prepare CN x multilayer films with high hardness and low internal stress by producing functional layers as Ti (TiN), TaN, and α –C . There, however, are few works concerning about the effect of nanoscaled functional layer on the microstructure, nitrogen content, and surface chemical composition of CN x films.…”

Section: Introductionmentioning

confidence: 99%

Bonding structure and mechanical properties of carbon nitride bilayer films with Ti and TiN interlayer

Zhou

Jiang

Рогачев

et al. 2014

Surface & Interface Analysis

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Carbon nitride (CN x ) bilayer films with Ti and TiN interlayer were synthesized by cathode arc technique at various nitrogen pressures (P N2 ). The dependences of microstructure and bonding composition of the films on the P N2 and interlayer were analyzed by Raman spectroscopy and X-ray photoelectron spectroscopy. Microstructure evolution consisting of the ordering and size of Csp 2 clusters, the faction of N-sp 3 /N-sp 2 bonds and graphite-like/pyridine-like configurations was dominated by P N2 , interlayer and annealing. The results showed that Ti and TiN interlayer decrease the atomic ratio of N/C and increase clustering Csp 2 . High P N2 induces the formation of C ≡ N and C À N bonds, the increase of sp 2 -bonding content and the growth of Csp 2 clusters. A large part of nitrogen atoms are coordinated with sp 2 -hybridized carbon (minimum 71% for annealed CN x monolayer). TiN/CN x bilayer had a higher content of pyridine-like configuration. Morphological characteristics of CN x monolayer and bilayer mainly depend on the surface character (roughness and surface energy) of the sublayer. The internal stress in the as-deposited Ti/CN x bilayer is smaller, but it after annealing is higher than that of CN x monolayer and TiN/CN x bilayer. These results may be of interest for studying the CN x films with controlled bonding composition and expected engineering properties.

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Structural and mechanical properties of TaN/a-CNx multilayer films

Cited by 25 publications

References 46 publications

Nanoscale Artificial Plasmonic Lattice in Self‐Assembled Vertically Aligned Nitride–Metal Hybrid Metamaterials

Nanoscale Artificial Plasmonic Lattice in Self‐Assembled Vertically Aligned Nitride–Metal Hybrid Metamaterials

Mechanical Properties and in Vitro and in Vivo Biocompatibility of a-C/a-C:Ti Nanomultilayer Films on Ti6Al4V Alloy as Medical Implants

Bonding structure and mechanical properties of carbon nitride bilayer films with Ti and TiN interlayer

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