Structural, chemical, optical and mechanical properties of Au doped AlN sputtered coatings

Figueiredo, N.M.; Vaz, F.; Cunha, L.; Rodil, S.E.; Cavaleiro, A.

doi:10.1016/j.surfcoat.2014.03.028

Cited by 10 publications

(7 citation statements)

References 28 publications

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“…3 we note the absence of the typical SPR extinction peaks, both in the as-deposited and 300 °C annealed coatings. This is an indication that the Au atoms should be incorporated in the coatings either in the form of very small nanoparticles (b1-2 nm) or dispersed in the amorphous Al-O matrix or both [30,38,55]. Moreover, for the as-deposited samples the transmittance curves denote a pronounced red-shift of the absorption edge with the gold content despite only a small reduction of the transmittance maxima (inset of Fig.…”

Section: Annealing Temperaturementioning

confidence: 91%

“…In the present study, Al-O thin films were alloyed with gold by reactive co-sputtering method, by means of incrusting different number of Au pieces into an aluminum target and using oxygen as a reactive gas. The films were then thermally annealed for one hour in a protective atmosphere at two different temperatures, 300 °C and 500 °C, in order to promote the segregation of Au nanoparticles in the matrix [4,13,38,39,40]. We have made previous studies on this Al-O + Au system, one regarding the integration/interaction between Au and the Al-O matrix studied through X-ray Photoelectron Spectroscopy (XPS) [41] and another one more focused on the sputtering conditions including…”

Section: Introductionmentioning

confidence: 99%

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Optical and microstructural properties of Au alloyed Al–O sputter deposited coatings

et al. 2016

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Section: Annealing Temperaturementioning

confidence: 91%

Section: Introductionmentioning

confidence: 99%

Optical and microstructural properties of Au alloyed Al–O sputter deposited coatings

et al. 2016

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“…After having determined the effective dielectric constant of the medium (ε eff ), the optical transmittance (T) of the nanocomposites can be calculated at normal incidence using the transfer matrix method [78,79]. The absorbance (A) can be determined through the relation [80]: A = −log T.…”

Section: Conflicts Of Interestmentioning

confidence: 99%

Au-WO3 Nanocomposite Coatings for Localized Surface Plasmon Resonance Sensing

et al. 2020

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Localized surface plasmon resonance (LSPR) gas sensors are gaining increasing importance due to their unique tuneable functional properties. Au-WO3−x nanocomposite coatings, in particular, can be outstandingly sensitive to many different gases. However, a proper understanding of their optical properties and the way in which those properties are correlated to their structure/microstructure, is still needed. In this work, Au-WO3 nanocomposite coatings, with Au contents between 0–11 atomic percent, were grown using reactive magnetron co-sputtering technique and were characterized concerning their optical response. The precipitation of Au nanoparticles in the oxide matrix was promoted through thermal annealing treatments until 500 °C. Along with the Au nanoparticles’ morphological changes, the annealing treatments stimulated the crystallization of WO3, together with the appearance of oxygen-deficient WO3−x phases. Through theoretical simulations, we have related the LSPR effect with the different structural and morphological variations (namely, size and distribution of the nanoparticles and their local environment), which were a function of the Au content and annealing temperature. Our results suggest that local voids were present in the vicinity of the Au nanoparticles, for all temperature range, and that they should be present in a wide variety of Au-WO3 nanocomposites. A theoretical study concerning the refractive index sensitivity was carried out in order to predict the optimal coating design parameters for gas sensing experiments.

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“…Metal-dielectric nanocomposites are commonly synthesized in the form of thin films using atom-by-atom vapor deposition in which thermodynamics, kinetics, and temporal profile of the deposition flux can be used to manipulate film growth and control film microstructure and morphology [13][14][15][16][17][18][19][20][21] . For instance, when the noble metal and dielectric material film forming species are deposited simultaneously, the low mutual solubility leads to precipitation of randomly dispersed metal nanoparticles with a relatively broad size distribution 22,23 .…”

Section: Introductionmentioning

confidence: 99%

Synthesis of tunable plasmonic metal-ceramic nanocomposite thin films by temporally modulated sputtered fluxes

Magnfält

Melander

Boyd

et al. 2017

Journal of Applied Physics

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The scientific and technological interest for metal-dielectric nanocomposite thin films emanates from the excitation of localized surface plasmon resonances (LSPRs) on the metal component. The overall optical response of the nanocomposite is governed by the refractive index of the dielectric matrix and the properties of the metallic nanoparticles in terms of their bulk optical properties, size, and shape, and the inter-particle distance of separation. In order to tune the film morphology and optical properties, complex synthesis processes which include multiple steps-i. e., film deposition followed by post-deposition treatment by thermal or laser annealing-are commonly employed. In the present study, we demonstrate that the absorption resonances of Ag/AlOxNy nanocomposite films can be effectively tuned from green (similar to 2.4 eV) to violet (similar to 2.8 eV) using a single-step synthesis process that is based on modulating the arrival pattern of film forming species with sub-monolayer resolution, while keeping the amount of Ag in the films constant. Our data indicate that the optical response of the films is the result of LSPRs on isolated Ag nanoparticles that are seemingly shifted by dipolar interactions between neighboring particles. The synthesis strategy presented may be of relevance for enabling integration of plasmonic nanocomposite films on thermally sensitive substrates. Published by AIP Publishing.

Funding Agencies|LiU Research Fellows Program; LiU Career [Dnr-LiU-2015-01510]; Knut and Alice Wallenberg foundation [2015.0060]

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Structural, chemical, optical and mechanical properties of Au doped AlN sputtered coatings

Cited by 10 publications

References 28 publications

Optical and microstructural properties of Au alloyed Al–O sputter deposited coatings

Optical and microstructural properties of Au alloyed Al–O sputter deposited coatings

Au-WO3 Nanocomposite Coatings for Localized Surface Plasmon Resonance Sensing

Synthesis of tunable plasmonic metal-ceramic nanocomposite thin films by temporally modulated sputtered fluxes

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