2022
DOI: 10.1590/1980-5373-mr-2021-0432
|View full text |Cite
|
Sign up to set email alerts
|

Structural, Morphological, Vibrational and Optical Properties of GaN Films Grown by Reactive Sputtering: The Effect of RF Power at Low Working Pressure Limit

Abstract: This work reports the properties of GaN films grown onto c-Si (100) at relatively low substrate temperature (400°C) by reactive magnetron sputtering. The study depicts the effect of working pressure and RF power on the GaN film structural, vibrational and optical properties characterized by X-ray diffraction, atomic force and scanning electron microscopies, Raman spectroscopy and spectroscopic ellipsometry. Unusual low pressure deposition condition (0.40 Pa) was achieved by using a separated argon inlet direct… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(2 citation statements)
references
References 39 publications
0
2
0
Order By: Relevance
“…Superior properties like this can be used for obtaining advanced devices. The deposition of AZO can be performed using the sol-gel dip and spin coating, chemical vapor deposition, magnetron sputtering, spray pyrolysis technique, etc., with various doping elements [23][24][25][26]. As a result of its band energy being more than 3.37 eV, zinc oxide (ZnO) may be utilised in a wide variety of commercial products, including pigments, paints, rubber, glass, metals, and batteries [27][28][29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%
“…Superior properties like this can be used for obtaining advanced devices. The deposition of AZO can be performed using the sol-gel dip and spin coating, chemical vapor deposition, magnetron sputtering, spray pyrolysis technique, etc., with various doping elements [23][24][25][26]. As a result of its band energy being more than 3.37 eV, zinc oxide (ZnO) may be utilised in a wide variety of commercial products, including pigments, paints, rubber, glass, metals, and batteries [27][28][29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%
“…Due to economic values and high demand given by a broad range of applications of coating technologies, there has been a significant effort and energy put into the design and study of functional thin films and technologies 12 . Magnetron sputtering 13 , sol-gel spin coating 14 , atomic layer deposition 15 , chemical vapor deposition 16 , solgel dip coating 17 , and pulsed laser deposition 18 are just a few of the techniques that can be employed to develop coatings.…”
Section: Introductionmentioning
confidence: 99%