Abstract:Conventional metal patterns in integrated circuits are known to exhibit drawbacks such as signal delays and heat generation. The use of the silicon photonics technology has been proposed to overcome these drawbacks. Silicon‐based materials and processing technologies offer cost‐effective solutions for large‐scale fabrication in microelectronics, such as for the fabrication of silicon integrated circuits. However, the fabrication of light‐emitting diodes using silicon‐based materials for the silicon photonics h… Show more
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