Structure and characterization of a planar normally closed bulk-micromachined piezoelectric valve for fuel cell applications

Zhao, Hengbing; Stanley, Kevin G.; Wu, Qingquan; Czyzewska, E.

doi:10.1016/j.sna.2004.11.037

Cited by 12 publications

(8 citation statements)

References 23 publications

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“…A compromise between size and performance was made using a valve having diameter and total thickness of 17 mm and 1.65 mm, respectively. The size is about the same as that reported for other piezoelectric or LTCC-based valves [3,11,12]. DuPont PX951 LTCC proved to be good choice for tests due to its well-known behaviour, optimized processing technologies and mechanical strength.…”

Section: Discussionmentioning

confidence: 58%

“…The valve exhibited modest performance compared to other reported valves especially in terms of leakage ratio which was several times larger than reported values in both silicon and polymer-based valves with pressures lower than 1 bar [3,11,12]. Leakage of the valve can be greatly improved by further work.…”

Section: Discussionmentioning

confidence: 61%

“…thermore, silicon, glass, polymer, and elastomer-based microvalves or throttles have been developed utilizing piezoactuators [11][12][13][14]. Piezoelectric valves are moderately easy to manufacture and provide a comparatively high stroke and actuation force and fast mechanical response [15].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Piezoelectric unimorph valve assembled on an LTCC substrate

Sobociński

Juuti

Jantunen

et al. 2009

Sensors and Actuators A: Physical

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Section: Discussionmentioning

confidence: 58%

Section: Discussionmentioning

confidence: 61%

See 1 more Smart Citation

Piezoelectric unimorph valve assembled on an LTCC substrate

Sobociński

Juuti

Jantunen

et al. 2009

Sensors and Actuators A: Physical

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“…2,6,7 In traditional piezoelectric active micro-valve, piezoelectric vibrator is normally used as a valve stopper to keep the channel closed or open directly, since the displacement of piezoelectric vibrator is small, the flow capacity and particle tolerance is low. [8][9][10][11] In order to obtain the structure with large displacement and small size, the micro-valves based on piezoelectric and hydraulic amplification mechanism have been presented. T. Ninomiya et al 12 and X. Arouette et al 13 reported hydraulic amplification mechanism that sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes, which has excellent performance in the amplification effect and dynamic characteristics and can be used as micro-valve driving actuator.…”

Section: Introductionmentioning

confidence: 99%

A normally-closed piezoelectric micro-valve with flexible stopper

et al. 2016

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In the field of controlled drug delivery system, there are still many problems on those reported micro-valves, such as the small opening height, unsatisfactory particle tolerance and high cost. To solve the above problems, a novel normally-closed piezoelectric micro-valve is presented in this paper. The micro-valve was driven by circular unimorph piezoelectric vibrator and natural rubber membrane with high elasticity was used as the valve stopper. The small axial displacement of piezoelectric vibrator can be converted into a large stroke of valve stopper based on hydraulic amplification mechanism. The experiment indicates that maximum hydraulic amplification ratio is up to 14, and the cut-off pressure of the micro-valve is 39kPa in the case of no working voltage. The presented micro valve has a large flow control range (ranging from 0 to 8.75mL/min).

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“…Due to their excellent electromechanical coupling, fast response and design flexibility, piezoelectric ceramics have been regarded as promising materials for constructing various devices in micromechanical systems (MEMS), such as ultrasonic micromotors [1], actuators [2], micropumps and microvalves [3,4] and accelerometers [5], etc . Among these, piezoelectric bimorph and multimorph are commonly employed as fundamental elements to complement the functions of different devices.…”

Section: Introductionmentioning

confidence: 99%

Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure

2011

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In this work, the problem of a curved functionally graded piezoelectric (FGP) actuator with sandwich structure under electrical and thermal loads is investigated. The middle layer in the sandwich structure is functionally graded with the piezoelectric coefficient g31 varying continuously along the radial direction of the curved actuator. Based on the theory of linear piezoelectricity, analytical solutions are obtained by using Airy stress function to examine the effects of material gradient and heat conduction on the performance of the curved actuator. It is found that the material gradient and thermal load have significant influence on the electroelastic fields and the mechanical response of the curved FGP actuator. Without the sacrifice of actuation deflection, smaller internal stresses are generated by using the sandwich actuator with functionally graded piezoelectric layer instead of the conventional bimorph actuator. This work is very helpful for the design and application of curved piezoelectric actuators under thermal environment.

show abstract

Structure and characterization of a planar normally closed bulk-micromachined piezoelectric valve for fuel cell applications

Cited by 12 publications

References 23 publications

Piezoelectric unimorph valve assembled on an LTCC substrate

Piezoelectric unimorph valve assembled on an LTCC substrate

A normally-closed piezoelectric micro-valve with flexible stopper

Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure

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