“…The detected peaks at 626 and 628 cm −1 are assigned to the cubic phase. The peaks at 148, 149, 150, 152, 264, 265, 273, 278, 337, 464, 463, 471, and 483 cm −1 are presence of tetragonal phase, and 199, 200, 201, 202, 375, and 382 cm −1 belong to monoclinic phase [16,26,[36][37][38][39][40][41][42][43]. The electrical properties of ScAlSZ thin films were investigated using EIS method, and the Nyquist plots (Figure 4a) were obtained from measurement data.…”