Structure and Morphology of Thin Films Deposited by Pulsed Laser Deposition Technique

Radziszewska, A.

doi:10.4028/www.scientific.net/ssp.186.160

Cited by 2 publications

(3 citation statements)

References 8 publications

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“…A nanocrystalline FCC structure of Al 65 Mg 35 phase was observed in the top layer of the film. Similar morphology of the Al-Mg thin films was observed with using other PLD conditions [49,50]. EDS chemical analysis (Figs.…”

Section: Pld Deposition Of Al-mg Alloyssupporting

confidence: 82%

“…Laser ablation process is the most novel technique used for production of -Al 3 Mg 2 thin films [48]. In our laboratory, Radziszewska used recently successfully this technique for production of -Al 3 Mg 2 thin films [49,50]. The Al-Mg films, discussed in this chapter, were grown by the pulsed laser deposition technique using a QSNd:YAG laser.…”

Section: Pld Deposition Of Al-mg Alloysmentioning

confidence: 99%

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Deposition Of Oxide And Intermetallic Thin Films By Pulsed Laser (PLD) And Electron Beam (PED) Methods

Kusiński¹,

Kopia²,

Cieniek³

et al. 2015

Archives of Metallurgy and Materials

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In this work the pulsed laser deposition (PLD) and the pulsed electron beam deposition (PED) techniques were used for fabrication of Mo-Bi 2 O 3 , La 1-x Sr x CoO 3 , La 1-x Ca x CoO 3 and Al-Mg thin films. An influence of ablation process basic parameters on the coatings structure and properties was discussed. Two types of laser ablation systems were applied: one equipped with a KrF excimer and second with a Q-switched Nd:YAG. Films were deposited on Si and MgO substrates. Scanning (SEM) and transmission (TEM) electron microscopy, atomic force microscopy (AFM) as well as X-ray diffraction (XRD) were used for structural analysis. Investigations focused on structure and chemical composition showed that smooth and dense thin films with nanocrystalline structure, preserving the composition of the bulk target, could be obtained by the both PLD and PED techniques. Research study showed that by a proper selection of PLD and PED process parameters it was possible to deposit films with significantly decreased amount and size of undesirably nanoparticulates.Keywords: PLD, PED, thin films, structure, doped oxidesOsadzanie laserem impulsowym (PLD) oraz osadzanie impulsową wiązka elektronową (PED) wykorzystane zostało do wytwarzania cienkich filmów typu: Mo-Bi 2 O 3 , La 1-x Sr x CoO 3 , La 1-x Ca x CoO 3 oraz Al-Mg. Dyskutowano wpływ podstawowych parametrów procesu ablacji na strukturę i właściwości uzyskiwanych powłok. Wykorzystane zostały dwa typy systemów do ablacji; jeden z ekscymerowym laserem KrF i drugi na bazie lasera Nd:YAG z modulatorem dobroci (Q-Switch). Filmy osadzano na podłożu Si i MgO. Skaningowa (SEM) i transmisyjna (TEM) mikroskopia elektronowa, mikroskopia sił atomowych (AFM), oraz dyfrakcja rentgenowska (XRD) wykorzystana została do analizy strukturalnej. Badania skoncentrowane na strukturze i skła-dzie chemicznym wykazały jednorodną i zwartą budowę cienkich nanokrystalicznych filmów uzyskanych metodami PLD i PED utrzymujących skład odparowywanych tarcz. Wykazano doświadczalnie, że odpowiednie dobranie parametrów procesu pozwala otrzymywać filmy o istotnym zminimalizowaniu ilości i wymiarów niekorzystnych nanocząstek w powłoce.

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Section: Pld Deposition Of Al-mg Alloyssupporting

confidence: 82%

Section: Pld Deposition Of Al-mg Alloysmentioning

confidence: 99%

Deposition Of Oxide And Intermetallic Thin Films By Pulsed Laser (PLD) And Electron Beam (PED) Methods

Kusiński¹,

Kopia²,

Cieniek³

et al. 2015

Archives of Metallurgy and Materials

View full text Add to dashboard Cite

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“…Radziszewska [97,98] Major et al [100,101] used the hybrid PLD system (Pulsed Laser Deposition + magnetron sputtering), equipped with high purity titanium (99.9% at. Ti) and carbon targets, for multilayer TiN/Ti/a-C:H coatings deposition.…”

Section: Laser Modification Of the Materials Surface Layer -A Review mentioning

confidence: 99%

Laser modification of the materials surface layer – a review paper

Kusiński¹,

Kąc²,

Kopia³

et al. 2012

Bulletin of the Polish Academy of Sciences: Technical Sciences

109

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Abstract. The state of laser processing in surface materials modification in Poland is reported, based on own experience, coworkers and coauthors results, as well the literature review. The curriculum concerning historical development of lasers and laser technology in Poland, laser-matter interaction, as well basis of different laser techniques applied in materials surface engineering (solid state hardening, melting, alloying, cladding, ablation, shot peening, cleaning and texturing) are reviewed, and compared with results of coauthors, as well with a wide range of Polish authors papers. Finally, it is concluded that overall state of research on laser application in surface engineering in Poland is well developed and still growing industrial application is observed.

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Structure and Morphology of Thin Films Deposited by Pulsed Laser Deposition Technique

Cited by 2 publications

References 8 publications

Deposition Of Oxide And Intermetallic Thin Films By Pulsed Laser (PLD) And Electron Beam (PED) Methods

Deposition Of Oxide And Intermetallic Thin Films By Pulsed Laser (PLD) And Electron Beam (PED) Methods

Laser modification of the materials surface layer – a review paper

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