1974
DOI: 10.1116/1.1318623
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Structure and properties of sputtered titanium carbide and titanium nitride coatings

Abstract: Articles you may be interested inStructure and mechanical properties of Ti-Si-N films deposited by combined DC/RF reactive unbalanced magnetron sputtering Reactive sputtered titanium carbide/nitride and diamondlike carbon coatings

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Cited by 26 publications
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“…The intensified interest in these transition metals (TMs) carbides and nitrides stems from the fact that they display a number of unique properties, including extremely high melting temperature and hardness, as well as high thermal and electrical conductivity and chemical stability [2]. The combination of such properties make these materials potential candidates for a variety of high temperature structural applications that gave rise to a number of theoretical studies [3][4][5][6][7][8][9][10][11] and experimental investigation [11][12][13][14][15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…The intensified interest in these transition metals (TMs) carbides and nitrides stems from the fact that they display a number of unique properties, including extremely high melting temperature and hardness, as well as high thermal and electrical conductivity and chemical stability [2]. The combination of such properties make these materials potential candidates for a variety of high temperature structural applications that gave rise to a number of theoretical studies [3][4][5][6][7][8][9][10][11] and experimental investigation [11][12][13][14][15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%