Structure and Properties of Titanium Doped Tungsten Disulfide Thin Films Produced via the Magnetron Co-Sputtering DC Technique

Abstract

In this work, titanium doped tungsten disulfide thin films (WS 2 -Ti) were deposited on AISI 304 stainlesssteel substrates using the magnetron co-sputtering DC technique. Films were produced with varying titaniumcathode power from 0 to 25 W. The titanium content of the WS 2 structure was determined using energy dispersive spectroscopy (EDS), thereby obtaining a maximum of 10% for the sample grown at 25 W. X-ray diffraction (XRD) results indicated, for the pure sample, the presence of a hexagonal phase of high intensity on the (103) plane. However, with the addition of titanium, the WS 2 crystallinity was reduced; nevertheless, when the titanium content was equal to 10%, nanocomposite formation was promoted. This effect was observed in TEM (transmission electron microscopy) images. Finally, the tribological behavior was determined using a ball on disk (BOD) test. With this method, friction coefficient curves were obtained with respect to the number of cycles, allowing the measurement of friction coefficient values of 0.1 for the pure sample and 0.15 for the sample grown at 5 W. Because of the low thickness of the samples, all of them failed during the first cycles.

Chemical vapour deposition of chromium-doped tungsten disulphide thin films on glass and steel substrates from molecular precursors

“…[30][31][32][33] Jhonattan et al deposited titanium doped tungsten disulfide film onto AISI 304 stainless-steel substrates using the magnetron co-sputtering DC technique. 34 Petr et al reported W-S-N coating deposited by d.c. reactive magnetron sputtering. They studied the effect of deposition conditions on chemical composition, morphology, tribological and mechanical properties.…”

Effect of target power on the structure and tribological Properties of La-Ti/WS2 composite films prepared by unbalanced magnetron sputtering

“…prepared WS 2 /Au and WS 2 /Cr composite films by magnetron sputtering, the results show that the doping of metal Au and Cr can improve the compactness of composite films, reduce the wear rate of composite films and improve their oxidation resistance. Jhonattan et al [8,9]. prepared WS 2 /Ti composite films by DC magnetron co-sputtering, the results confirm that the compactness and tribological properties of WS 2 /Ti composite films were improved, corrosion resistance was enhanced.…”