Structure-Designable Formation-Method of Super Low-k SiOC Film (k=2.2) by Neutral-Beam-Enhanced-CVD

Yasuhara, Shigeo; Chung, Juhyun; Tajima, Kunitoshi; Yano, Hisashi; Kadomura, S.; Yoshimaru, Masaki; Matsunaga, N.; Kubota, Tomohiro; Ohtake, Hiroto; Samukawa, Seiji

doi:10.1109/iitc.2008.4546929

Cited by 1 publication

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“…In order to confirm the role of atomic oxygen on coating properties, FTIR analysis was carried out for various ratios of O 2 : HMDSO. GRILL [16,17] et al deconvoluted the Si-O-Si asymmetric stretching band in the range of 1250∼ 950 cm −1 into three peaks centered at 1135 cm −1 , 1063 cm −1 , and 1023 cm −1 . They were considered to correspond to cage, network and linear structures based on the different bond angles, respectively.…”

Section: Variation Of Oxygen (O 2 ) Concentrationmentioning

confidence: 99%

Kinetic Migration of Diethylhexyl Phthalate in Functional PVC Films

Fei

Liu²,

Chen³

et al. 2012

Plasma Sci. Technol.

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Plasticizers that are generally used in plastics to produce flexible food packaging materials have proved to cause reproductive system problems and women's infertility. A longterm consumption may even cause cancer diseases. Hence a nano-scale layer, named as functional barrier layer, was deposited on the plastic surface to prevent plasticizer diethylhexyl phthalate's (DEHP) migration from plastics to foods. The feasibility of functional barrier layer i.e. SiOx coating through plasma enhanced chemical vapor deposition (PECVD) process was then described in this paper. We used Fourier transform infrared spectroscopy (FTIR) to analyze the chemical composition of coatings, scanning electron microscope (SEM) to explore the topography of the coating surfaces, surface profilemeter to measure thickness of coatings, and high-performance liquid chromatography (HPLC) to evaluate the barrier properties of coatings. The results have clearly shown that the coatings can perfectly block the migration of the DEHP from plastics to their containers. It is also concluded that process parameters significantly influence the block efficiency of the coatings. When the deposition conditions of SiOx coatings were optimized, i.e. 50 W of the discharge power, 4 : 1 of ratio of O2 : HMDSO, and ca.100 nm thickness of SiOx, 71.2% of the DEHP was effectively blocked.

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Section: Variation Of Oxygen (O 2 ) Concentrationmentioning

confidence: 99%