Studies on a new cleaning procedure for PFA-surfaces

Schuster, Michael; Ringmann, S.; Gärtner, Robert S.; Lin, Xucong; Dahmen, J.

doi:10.1007/s002160050150

Cited by 7 publications

(4 citation statements)

References 4 publications

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“…1. Starting from sample preparation in clean boxes or clean rooms the samples to be analysed have to be handled in PFA (perfluoroalkoxy) and quartz vessels before and in synthetic quartz vessels during irradiation to reduce the blank value of the analysis [1]. The irradiation parameters of sample mass and neutron flux should be as large as possible while the irradiation time can be adapted to the matrix and to the trace elements to be determined.…”

Section: Increasing the Sensitivity Of Naamentioning

confidence: 99%

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Determination of radioactive trace elements in ultra low background detectors by means of neutron activation analysis

et al. 1999

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Section: Increasing the Sensitivity Of Naamentioning

confidence: 99%

“…These detectors are designed to measure rare interactions of particles at the lowest possible background being shielded from cosmic and natural radioactivity since this activity can mimic the type of interaction one is interested in [1].…”

Section: Introductionmentioning

confidence: 99%

Determination of radioactive trace elements in ultra low background detectors by means of neutron activation analysis

et al. 1999

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“…The sensitivity of NAA is not only limited by the matrix but it is also determined by the activation parameters. The samples have to be prepared in clean boxes or clean rooms and handled in PFA (perfluoroalkoxy polymeric materials) and quartz vessels before the irradiation and in synthetic quartz vessels during the irradiation, in order to reduce the blank value of the analysis [19]. The irradiation parameters of sample mass and neutron flux should be as large as possible while the irradiation time can be adjusted to the matrix and the trace elements to be determined.…”

Section: Increasing the Sensitivity Of Naamentioning

confidence: 99%

Measurements of extremely low radioactivity levels in BOREXINO

Arpesella

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Balata

et al. 2002

Astroparticle Physics

148

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The techniques researched, developed and applied towards the measurement of radioisotope concentrations at ultra-low levels in the real-time solar neutrino experiment BOREXINO at Gran Sasso are presented and illustrated with specific results of widespread interest. We report the use of low-level germanium gamma spectrometry, low-level miniaturized gas proportional counters and low background scintillation detectors developed in solar neutrino research. Each now sets records in its field. We additionally describe our techniques of radiochemical ultra-pure, few atom manipulations and extractions. Forefront measurements also result from the powerful combination of neutron activation and low-level counting. Finally, with our techniques and commercially available mass spectrometry and atomic absorption spectroscopy, new low-level detection limits for isotopes of interest are obtained.Comment: 27 pages, 5 figures. Submitted to Astroparticle Physics (17 Sep 2001). Spokesperson of the Borexino Collaboration: G. Bellini. Corresponding author: W. Hampe

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“…At present, wet processes in semiconductor manufacturing require high purity standards and improved materials for fluid system components 1–3 . High‐purity chemicals used in the manufacturing of semiconductors, such as hydrofluoric acid, nitric acid, and potassium hydroxide, are transported through valves, fittings, and containers 4 .…”

Section: Introductionmentioning

confidence: 99%

Research on metallic contamination control of PFA injection molded fittings

Liu

Xie

et al. 2023

J of Applied Polymer Sci

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In chip manufacturing, ultraclean environment is essential during wet processes such as etching, cleaning, and other stages. The fittings used in the process require corrosion resistance, which are made of perfluoroalkoxy alkanes (PFA) by injection molding. Metallic contamination is one of the major impurities for ultraclean products. This study devotes to decreasing the metallic impurities of the parts and improving the wet processes environment.First, the preliminary experiment explored impurities distribution of the injection molds. By comparing the metallic contamination of the different molds' parts, it is shown that the impurities are evenly distributed. Subsequently, the influence of process parameters, including melt temperature, injection rate, screw speed, and holding pressure, on metallic contamination was investigated through the orthogonal experiment. The results indicate that the injection rate has the greatest impact on metallic contamination, followed by melt temperature. With process optimization, the smallest metallic contamination of 1.077 μg/m 2 for pipe joints made of PFA can be achieved, which decreases by 56.3% compared with former results. This research indicates that adjusting parameters is a feasible and effective method to reduce the contamination during injection molding of ultraclean products, which provides another idea for improving the cleanliness of the environment in chip manufacturing.

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Studies on a new cleaning procedure for PFA-surfaces

Cited by 7 publications

References 4 publications

Determination of radioactive trace elements in ultra low background detectors by means of neutron activation analysis

Determination of radioactive trace elements in ultra low background detectors by means of neutron activation analysis

Measurements of extremely low radioactivity levels in BOREXINO

Research on metallic contamination control of PFA injection molded fittings

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