Studies on plasma polymerization of hexamethyldisiloxane in the presence of different carrier gases

Abstract

Plasma polymerization of hexamethyldisiloxane(HMDSO) in the presence of different carrier gases such as H 2 , He, N 2 , Ar, and O 2 was carried out using an inductively coupled electrodeless glow discharge. The polymerization kinetics showed that the monomer HMDSO plasma-polymerized at different rates from low to high for the carrier gases H 2 , He, N 2 , Ar, and O 2 in that order. The products were studied using FTIR, electron spectroscopy for chemical analysis, and elemental analysis. The results indicated that HMDSO molecules underwent different degrees of fragmentation in plasma polymerization for different carrier gases and radio frequency (RF) powers. The polymer deposition rate and the structures of products were mainly dependent on molecular fragmentation, which varied with carrier gas and imposed RF power. O 2 and H 2 gases can incorporate in the plasma polymers to form products containing more oxygen or hydrogen components, while other gases such as N 2 have no detectable component in products.

Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas

“…Note that this peak has also been assigned to SiCH 2 Si bridging groups 35. The addition of O 2 has reduced the intensity of the hydrocarbon absorbance bands at ≈2 958, ≈2 900, ≈1 254, and 839 cm −1 (Table 2), 36–39 relative to the absorbance band for SiOSi/SiOC at ≈1 034 cm −1 . The silanol signal at ≈3 500 cm −1 is also reduced in intensity.…”

Effect of oxygen plasma treatment on the bonding of a soft liner to an acrylic resin denture material

“…1, similar to the one employed in our previous study 15) . Briefly, the apparatus was equipped with a radio frequency (RF) power generator operating at a frequency of 13.56 MHz by means of inductively coupled electrodeless glow discharge.…”

Influence of Argon and Nitrogen Admixture in HMDSO/O2 Plasmas onto Powder Formation

“…In the plasma, dissociation and ionization of HMDSO molecule represent an essential initial step in the process of polymerization. It is supposed that, in case of argon admixture, among all the fragments, the pentamethyldisiloxane (CH 3 ) 3 SiOSi(CH 3 ) 2 cation plays a fundamental role in the subsequent chemistry:26, 35–37 …”