“…where (x o , θ o , y o , Φ o ) represents the position and divergence angle of a beam particle in the object plane, δ o is the particle momentum relative to the mean momentum, the demagnification of the system is x|x −1 and y|y −1 in the image plane, x|θ and y|Φ are the astigmatism coefficients, x|θδ and y|Φδ are the chromatic aberration coefficients, and x|θ 3 , x|θΦ 2 , y|Φ 3 and y|θ 2 Φ are the spherical aberration coefficients. In a well-focused system, the astigmatism coefficients are zero.…”