Study of dynamical formation and shape of microlenses formed by the reflow method

Audran, S.; Faure, Benoît; Mortini, Bénédicte; Aumont, C.; Tiron, Raluca; Zinck, C.; Sanchez, Y.; Fellous, C.; Régolini, J. L.; Reynard, J. P.; Schlatter, Guy; Hadziioannou, Georges

doi:10.1117/12.656371

Cited by 13 publications

(9 citation statements)

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“…The thermal reflow method has been used to produce microlens arrays in the last few decades [30][31][32][33][34]. The fabrication process is depict in Figure 4 [30]: first, the photoresist layer is coated onto the substrate to let the UV-light thrust through the mask which has circular array patterns.…”

Section: Thermal Reflow Methodsmentioning

confidence: 99%

Fabrication of Microlens Array and Its Application: A Review

Wang

Lee

et al. 2018

Chin. J. Mech. Eng.

140

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Microlens arrays are the key component in the next generation of 3D imaging system, for it exhibits some good optical properties such as extremely large field of view angles, low aberration and distortion, high temporal resolution and infinite depth of field. Although many fabrication methods or processes are proposed for manufacturing such precision component, however, those methods still need to be improved. In this review, those fabrication methods are categorized into direct and indirect method and compared in detail. Two main challenges in manufacturing microlens array are identified: how to obtain a microlens array with good uniformity in a large area and how to produce the microlens array on a curved surface? In order to effectively achieve control of the geometry of a microlens, indirect methods involving the use of 3D molds and replication technologies are suggested. Further development of ultraprecision machining technology is needed to reduce the surface fluctuation by considering the dynamics of machine tool in tool path planning. Finally, the challenges and opportunities of manufacturing microlens array in industry and academic research are discussed and several principle conclusions are drawn.

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Section: Thermal Reflow Methodsmentioning

confidence: 99%

Fabrication of Microlens Array and Its Application: A Review

Wang

Lee

et al. 2018

Chin. J. Mech. Eng.

140

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“…It is important to take into consideration that the region of the photodiode is sensitive to light, but not all the pixel surface, which means not all the pixel surface can collect photons. A layer of microlenses is used to focus the incident light onto these photodiodes [2][3][4] To increase the efficiency of the CMOS sensor, every microlens should have a high coverage of the pixel, be light-transparent, and must have a target shape. Consequently, the shape of the microlens should be optimized and controlled.…”

Section: Introductionmentioning

confidence: 99%

3D SEM metrology of microstructures for high volume manufacturing

Abdallah,

Fay,

Bonnet

2023

38th European Mask and Lithography Conference (EMLC 2023)

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“…The fabrication methods of the micro-lens array can be divided into direct and indirect ones. Direct methods include the reflow methods [ 2 , 3 ], ink-jet printing technique [ 4 , 5 ], etc. [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

Fast and Accurate Light Field View Synthesis by Optimizing Input View Selection

et al. 2021

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There is a trade-off between spatial resolution and angular resolution limits in light field applications; various targeted algorithms have been proposed to enhance angular resolution while ensuring high spatial resolution simultaneously, which is also called view synthesis. Among them, depth estimation-based methods can use only four corner views to reconstruct a novel view at an arbitrary location. However, depth estimation is a time-consuming process, and the quality of the reconstructed novel view is not only related to the number of the input views, but also the location of the input views. In this paper, we explore the relationship between different input view selections with the angular super-resolution reconstruction results. Different numbers and positions of input views are selected to compare the speed of super-resolution reconstruction and the quality of novel views. Experimental results show that the speed of the algorithm decreases with the increase of the input views for each novel view, and the quality of the novel view decreases with the increase of the distance from the input views. After comparison using two input views in the same line to reconstruct the novel views between them, fast and accurate light field view synthesis is achieved.

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Study of dynamical formation and shape of microlenses formed by the reflow method

Cited by 13 publications

References 0 publications

Fabrication of Microlens Array and Its Application: A Review

Fabrication of Microlens Array and Its Application: A Review

3D SEM metrology of microstructures for high volume manufacturing

Fast and Accurate Light Field View Synthesis by Optimizing Input View Selection

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