Study of Parameters and Characteristics of MEMS Capacitive Accelerometer with Vertical Overlap Comb Drive Construction

Aung, Ye Ko Ko; Thura, Aung; Simonov, Boris M.; Тимошенков, С. П.; Oo, Zaw Min

doi:10.1109/eiconrus.2019.8657070

Cited by 5 publications

(1 citation statement)

References 4 publications

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“…Several works were conducted in order to improve the physical characteristics and the performances of the capacitive sensor [3][4][5][6][7][8]. In this work, the modeling of the capacitive detection sensor aims to extract the formulas for acceleration and measurement error.…”

Section: Introductionmentioning

confidence: 99%

Capacitive Sensor Accuracy Optimisation by the Frequency Range Appropriate Choice

Ghemari

Belkhiri

2021

Preprint

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Measuring rotating machine vibrations requires an electronic instrument called a vibration sensor. In this work, the vibration sensor with capacitive detection is chosen to measure the vibrations movement. In order to fulfill the objectives of reducing the measurement error and achieving high sensor accuracy, this sensor is modeled by the application of motion law. The results obtained by the developed model simulation showed that it was possible to extract a formula linked to relative frequency of the vibrating structure and to the capacitive sensor natural frequency, this makes it possible to reduce the measurement error and improve the capacitive sensor accuracy

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Section: Introductionmentioning

confidence: 99%

Capacitive Sensor Accuracy Optimisation by the Frequency Range Appropriate Choice

Ghemari

Belkhiri

2021

Preprint

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A capacitive sensor with high measurement accuracy and low electrical energy consumption

2023

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Study of a novel capacitive pressure sensor using spiral comb electrodes

Chen,

Yang,

Liu

et al. 2024

Meas. Sci. Technol.

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For traditional capacitive pressure sensors, high nonlinearity and poor sensitivity greatly limited their sensing applications. Hence, an innovative design of capacitors based on spiral comb electrodes is proposed for high-sensitivity pressure detection in this work. Compared to traditional capacitive pressure sensors with straight plate comb electrodes, the proposed sensor with the spiral comb electrodes increases the overlap areas of electrodes sufficiently, the pressure sensitivity can thus be greatly improved. Moreover, the capacitance variation of the proposed sensor is dominated by the change of the overlap area of the electrodes rather than the electrode’s distance, the linearity can also thus be improved to higher than 0.99. Theoretical analysis and COMSOL-based finite element simulation have been implemented for principle verification and performance optimization. Simulation results show that the proposed design has a mechanical sensitivity of 1.5 × 10−4 m Pa−1, capacitive sensitivity of 1.10 aF Pa−1, and nonlinear error of 3.63%, respectively, at the pressure range from 0 to 30 kPa. An equivalent experiment has been further carried out for verification. Experimental results also show that both the sensitivity and linearity of capacitive pressure sensors with spiral comb electrodes are higher than those with straight comb electrodes. This work not only provides a new avenue for capacitor design, but also can be applied to high-sensitivity pressure detection.

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Study of Parameters and Characteristics of MEMS Capacitive Accelerometer with Vertical Overlap Comb Drive Construction

Cited by 5 publications

References 4 publications

Capacitive Sensor Accuracy Optimisation by the Frequency Range Appropriate Choice

Capacitive Sensor Accuracy Optimisation by the Frequency Range Appropriate Choice

A capacitive sensor with high measurement accuracy and low electrical energy consumption

Study of a novel capacitive pressure sensor using spiral comb electrodes

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