Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Reig, Benjamin; Bardinal, Véronique; Doucet, Jean‐Baptiste; Daran, Emmanuelle; Camps, Thierry; Aufray, Maëlenn; Lamure, A.; Tendero, Claire

doi:10.7567/jjap.53.08mc03

Cited by 5 publications

(1 citation statement)

References 25 publications

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“…We recently reported an assessment of the reliability of SU-8 microstructures for passive micro-optics [39] with the aim of extending this study on movable structures. Nevertheless, SU-8 presents specific advantages for MOEMS due to its optical properties.…”

Section: Interest In Polymer Moems For Microoptics Applications Omentioning

confidence: 99%

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Bardinal

Camps

Reig

et al. 2015

IEEE J. Select. Topics Quantum Electron.

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In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III-V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

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Section: Interest In Polymer Moems For Microoptics Applications Omentioning

confidence: 99%

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Bardinal

Camps

Reig

et al. 2015

IEEE J. Select. Topics Quantum Electron.

Self Cite

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Efficient light-trapping in ultrathin GaAs solar cells using quasi-random photonic crystals

et al. 2022

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Harnessing the capabilities of VCSELs: unlocking the potential for advanced integrated photonic devices and systems

Pan,

Xun,

Zhou

et al. 2024

Light Sci Appl

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Vertical cavity surface emitting lasers (VCSELs) have emerged as a versatile and promising platform for developing advanced integrated photonic devices and systems due to their low power consumption, high modulation bandwidth, small footprint, excellent scalability, and compatibility with monolithic integration. By combining these unique capabilities of VCSELs with the functionalities offered by micro/nano optical structures (e.g. metasurfaces), it enables various versatile energy-efficient integrated photonic devices and systems with compact size, enhanced performance, and improved reliability and functionality. This review provides a comprehensive overview of the state-of-the-art versatile integrated photonic devices/systems based on VCSELs, including photonic neural networks, vortex beam emitters, holographic devices, beam deflectors, atomic sensors, and biosensors. By leveraging the capabilities of VCSELs, these integrated photonic devices/systems open up new opportunities in various fields, including artificial intelligence, large-capacity optical communication, imaging, biosensing, and so on. Through this comprehensive review, we aim to provide a detailed understanding of the pivotal role played by VCSELs in integrated photonics and highlight their significance in advancing the field towards efficient, compact, and versatile photonic solutions.

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Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Abstract: OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible.

Cited by 5 publications

References 25 publications

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Efficient light-trapping in ultrathin GaAs solar cells using quasi-random photonic crystals

Harnessing the capabilities of VCSELs: unlocking the potential for advanced integrated photonic devices and systems

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