Study on Ablation Characteristics of Femyosecond Laser Nanoscale Processing for Aluminum Nitride and LeadZirconate Titanate Ceramics

Abstract

This paper analytically investigates an ultrashort pulsed laser nanoscale processing for aluminum nitride (AIN) and lead zirconate titanate (PZT) ceramics. Processing characteristics of an ultra-short pulsed laser is different from that of long-pulsed laser due to ultrahigh intensity, ultrahigh power, and ultrashort time. The ultrasmall processing for materials can achieved by an ultra-short pulsed laser. This study proposes a model to analyze an ultrashort pulsed laser nanoscale processing for aluminum nitride (AIN) and lead zirconate titanate (PZT) ceramics. The effects of optical penetration absorption and thermal diffusion on temperature are also discussed. The results reveal that the variation of ablation rate with laser fluences predicted by this work agrees with the available measured data for an ultrashort pulsed laser processing for AIN and PZT. For femtosecond lasers, the optical absorption and thermal diffusion, respectively, governs the ablated depth per pulse at the low and high laser fluences. The thermal diffusion length is small relative to the optical penetration depth for femtosecond laser. The optical penetration absorption governs the temperature in the workpiece. On the other hand, for the picosecond laser, the thermal diffusion length is large compared to the optical penetration depth. The thermal diffusion determines the temperature in the workpiece.