Study on MEMS Microgripper Integrated Vacuum Tool

Abstract

This paper presents a hybrid type of microelectromechanical systems (MEMS) microgripper integrated with an electrostatic mechanism and vacuum technology. Vacuum tools are integrated in this microgripper in order to achieve a reliable and accurate manipulation of microobjects. The microgripper is fabricated by a surface and bulk micromachining technology. The pick and release micromanipulation of microobjects is accomplished by electrostatic driving force caused by comb structure and an auxiliary air pressure force from air pump. The performance of this new hybrid type of microgripper is experimentally demonstrated through the manipulation of 100–200μm polystyrene balls. Experimental results show that this microgripper can successfully fulfill the pick and release micromanipulation.